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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Sinusoidal phase-modulating Fizeau interferometer using phase-conjugate wave

http://hdl.handle.net/10191/27486
http://hdl.handle.net/10191/27486
fb176a5b-cabd-4d92-a780-e8fdc2619570
名前 / ファイル ライセンス アクション
2003_12-20.pdf 2003_12-20.pdf (756.1 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Sinusoidal phase-modulating Fizeau interferometer using phase-conjugate wave
タイトル
言語 en
タイトル Sinusoidal phase-modulating Fizeau interferometer using phase-conjugate wave
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 169541

Sasaki, Osami

Search repository
Wang, Xiangzhao

× Wang, Xiangzhao

WEKO 169542

Wang, Xiangzhao

Search repository
Takebayashi, Yuuichi

× Takebayashi, Yuuichi

WEKO 169543

Takebayashi, Yuuichi

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 We propose a sinusoidal phase-modulating Fizeau interferometer using self-pumped conjugate wave for surface profile measurements. The interferometer is self-referencing and free from the effects of the axial movements of object surfaces. The characteristics of the interferometer are made clear through the surface measurement of a diamond-turned aluminum disk. For large-size objects, the size of the plate glass can be much smaller than that of the object. The small-size plate glass provides the accurate sinusoidal phase modulation easily. We also propose the method of absolute measurement to eliminate the undesirable phase distribution caused by aberration of the lenses. It is shown through the surface profile measurements of a mirror that the interferometer and the method of absolute measurement are useful for large- size objects.
内容記述
内容記述タイプ Other
内容記述 Interferometry 6 : techniques and analysis : Conference : Jul 1993, San Diego, CA
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 2003, p. 12-20, 発行日 1993-12
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.165461
権利
権利情報 Copyright 1993 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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