WEKO3
アイテム
Sinusoidal wavelength-scanning interferometers using a superluminescent diode
http://hdl.handle.net/10191/27470
http://hdl.handle.net/10191/27470f59064aa-e257-4b5b-aa8f-de85f016bf3d
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
3745_196-204.pdf (613.7 kB)
|
|
| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Sinusoidal wavelength-scanning interferometers using a superluminescent diode | |||||
| タイトル | ||||||
| タイトル | Sinusoidal wavelength-scanning interferometers using a superluminescent diode | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| 著者 |
Sasaki, Osami
× Sasaki, Osami× Murata, Norihiko× Akiyama, Kazuhiro× Suzuki, Takamasa |
|||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Two different sinusoidal wavelength-scanning (SWS) interferometers with a SWS light source using a superluminescent laser diode are proposed for step-profile measurement and real-time distance measurement, respectively. An optical path difference (OPD) longer than a wavelength is measured from detection of sinusoidal phase- modulation amplitude Zb of the interference signal that is proportional to the OPD and the scanning width 2b. In step-profile measurement, if measurement error in the OPD obtained from Zb is smaller than a half wavelength, this measured value of the OPD is combined with a fractional value of the OPD obtained from the conventional phase of the interference signal. This combination enables us to measure the OPD longer than a wavelength with a high accuracy of a few nm. In real-time distance measurement, the amplitude Zb is kept at a specified constant value for changes of OPD by controlling the scanning width 2b of the wavelength with a feedback system. The amplitude Zb is detected by processing the interference signal with electric circuits in real-time. The value of b is easily controlled in the SWS light source, and an OPD longer than a wavelength is measured from the value of b with an accuracy of about a wavelength. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | Applications : Conference : Sep 1999, Pultusk, Poland | |||||
| 書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 3745, p. 196-204, 発行日 1999-09 |
|||||
| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0277786X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10619755 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.357778 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 1999 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
