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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method

http://hdl.handle.net/10191/27495
http://hdl.handle.net/10191/27495
beb6b2d9-4b97-4916-9107-c29def583623
名前 / ファイル ライセンス アクション
4919_275-282.pdf 4919_275-282.pdf (735.8 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method
タイトル
タイトル Sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method
言語 en
言語
言語 eng
キーワード
主題Scheme Other
主題 sinusoidal phase modulation
キーワード
主題Scheme Other
主題 laser diode
キーワード
主題Scheme Other
主題 interferometer
キーワード
主題Scheme Other
主題 integrating bucket method
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Zhao, Xuefeng

× Zhao, Xuefeng

WEKO 169472

Zhao, Xuefeng

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Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

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Sasaki, Osami

× Sasaki, Osami

WEKO 169474

Sasaki, Osami

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抄録
内容記述タイプ Abstract
内容記述 We propose a sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method. In previous integrating bucket method, four images, which are integrated values of the interference pattern detected by a CCD image sensor, are required. According to additive and subtractive operations in a calculator, the quadrature signals can be calculated from these images. While these operations are associated with the technical computing software, such as MATLAB, in a personal computer, it is quite fast, even if the images possess large size. In a standard-alone system with a CPU, however, this kind of operation expends unbearable time. To lighten the burden of the calculator, we tried to simplify the operation. That is, on the basis of integrating bucket method, the subtraction in the signal processing is transformed to the addition by use of the phase shifting technique. All additive operations are achieved with the CCD image sensor. In this interferometer, not only the calculating quantity is reduced, but also the number of required images is reduced. The surface profile of a diamond-turned aluminum disk was measured. The repeatability in the measurements was 5.93 nm rms.
内容記述
内容記述タイプ Other
内容記述 Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. : Oct 2002, Shanghai, China
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 4919, p. 275-282, 発行日 2002-10
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.465814
権利
権利情報 Copyright 2002 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
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