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Sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method
http://hdl.handle.net/10191/27495
http://hdl.handle.net/10191/27495beb6b2d9-4b97-4916-9107-c29def583623
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
4919_275-282.pdf (735.8 kB)
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| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method | |||||
| タイトル | ||||||
| タイトル | Sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | sinusoidal phase modulation | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | laser diode | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | interferometer | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | integrating bucket method | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_5794 | |||||
| タイプ | conference paper | |||||
| 著者 |
Zhao, Xuefeng
× Zhao, Xuefeng× Suzuki, Takamasa× Sasaki, Osami |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We propose a sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method. In previous integrating bucket method, four images, which are integrated values of the interference pattern detected by a CCD image sensor, are required. According to additive and subtractive operations in a calculator, the quadrature signals can be calculated from these images. While these operations are associated with the technical computing software, such as MATLAB, in a personal computer, it is quite fast, even if the images possess large size. In a standard-alone system with a CPU, however, this kind of operation expends unbearable time. To lighten the burden of the calculator, we tried to simplify the operation. That is, on the basis of integrating bucket method, the subtraction in the signal processing is transformed to the addition by use of the phase shifting technique. All additive operations are achieved with the CCD image sensor. In this interferometer, not only the calculating quantity is reduced, but also the number of required images is reduced. The surface profile of a diamond-turned aluminum disk was measured. The repeatability in the measurements was 5.93 nm rms. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. : Oct 2002, Shanghai, China | |||||
| 書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 4919, p. 275-282, 発行日 2002-10 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0277786X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10619755 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.465814 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 2002 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
