WEKO3
アイテム
Scale-reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity
http://hdl.handle.net/10191/31227
http://hdl.handle.net/10191/31227b9c38282-ab6e-4643-afd5-72c537198d20
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
4987_248-255.pdf (856.4 kB)
|
|
| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-12-24 | |||||
| タイトル | ||||||
| タイトル | Scale-reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity | |||||
| タイトル | ||||||
| タイトル | Scale-reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Integrated optics | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | pressure sensor | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | elasto-optic effect | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | silicon | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | diaphragm | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| 著者 |
Yamada, Atsushi
× Yamada, Atsushi× Tokita, Toru× Ohkawa, Masashi× Sekine, Seishi× Sato, Takashi |
|||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | In this paper, an original scale-reduction rule without sensitivity loss in integrated optic pressure sensors based on the elasto-optic effect is described. The sensor has a rectangular diaphragm as a pressure-sensitive mechanical structure and a sensing waveguide on the diaphragm. In this type of sensor, sensitivity is theoretically known to be strongly dependent on the dimensions of the diaphragm. According to the theoretical results, the sensitivity can be kept constant even if the diaphragm dimensions are reduced as long as both the side length ratio and the characteristic length remain constant. Here, the characteristic length is introduced as the sube of the shorter side length of the diaphragm divided by the square of the thickness. Such a scale-reduction rule would be very significant in the miniaturizing of a sensor without reducing sensitivity, but it has not been experimentally confirmed. In this study, the scale-reduction rule was experimentally examined using three fabricated sensors, which had the same side length ratio and the same characteristic length. The exact dimensions of the sensors were 2.0 mm x 10mmx35 μm, 2.5 mmx12.5 mmx49 μm and 3.0 mmx15 mmx64 μm. The measured sensitivities of the three sensors were quite similar to each other as theoretically predicted. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | Integrated optics: devices, materials, and technologies 7 : 27-29 January 2003 : San Jose, California, USA. : Jan 2003, San Jose, CA | |||||
| 書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 4987, p. 248-255, 発行日 2003-07 |
|||||
| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0277786X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10619755 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.474347 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 2003 Society of Photo-Optical Instrumentation Engineers | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
