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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Scale-reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity

http://hdl.handle.net/10191/31227
http://hdl.handle.net/10191/31227
b9c38282-ab6e-4643-afd5-72c537198d20
名前 / ファイル ライセンス アクション
4987_248-255.pdf 4987_248-255.pdf (856.4 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-12-24
タイトル
タイトル Scale-reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity
タイトル
言語 en
タイトル Scale-reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity
言語
言語 eng
キーワード
主題Scheme Other
主題 Integrated optics
キーワード
主題Scheme Other
主題 pressure sensor
キーワード
主題Scheme Other
主題 elasto-optic effect
キーワード
主題Scheme Other
主題 silicon
キーワード
主題Scheme Other
主題 diaphragm
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Yamada, Atsushi

× Yamada, Atsushi

WEKO 169454

Yamada, Atsushi

Search repository
Tokita, Toru

× Tokita, Toru

WEKO 169455

Tokita, Toru

Search repository
Ohkawa, Masashi

× Ohkawa, Masashi

WEKO 169456

Ohkawa, Masashi

Search repository
Sekine, Seishi

× Sekine, Seishi

WEKO 169457

Sekine, Seishi

Search repository
Sato, Takashi

× Sato, Takashi

WEKO 169458

Sato, Takashi

Search repository
抄録
内容記述タイプ Abstract
内容記述 In this paper, an original scale-reduction rule without sensitivity loss in integrated optic pressure sensors based on the elasto-optic effect is described. The sensor has a rectangular diaphragm as a pressure-sensitive mechanical structure and a sensing waveguide on the diaphragm. In this type of sensor, sensitivity is theoretically known to be strongly dependent on the dimensions of the diaphragm. According to the theoretical results, the sensitivity can be kept constant even if the diaphragm dimensions are reduced as long as both the side length ratio and the characteristic length remain constant. Here, the characteristic length is introduced as the sube of the shorter side length of the diaphragm divided by the square of the thickness. Such a scale-reduction rule would be very significant in the miniaturizing of a sensor without reducing sensitivity, but it has not been experimentally confirmed. In this study, the scale-reduction rule was experimentally examined using three fabricated sensors, which had the same side length ratio and the same characteristic length. The exact dimensions of the sensors were 2.0 mm x 10mmx35 μm, 2.5 mmx12.5 mmx49 μm and 3.0 mmx15 mmx64 μm. The measured sensitivities of the three sensors were quite similar to each other as theoretically predicted.
内容記述
内容記述タイプ Other
内容記述 Integrated optics: devices, materials, and technologies 7 : 27-29 January 2003 : San Jose, California, USA. : Jan 2003, San Jose, CA
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 4987, p. 248-255, 発行日 2003-07
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.474347
権利
権利情報 Copyright 2003 Society of Photo-Optical Instrumentation Engineers
著者版フラグ
値 publisher
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