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Vibration insensitive interferometer using sinusoidal phase-modulation and feedback control
http://hdl.handle.net/10191/27491
http://hdl.handle.net/10191/274916178ff8e-b50c-4bed-ac42-8378faf5ac3a
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
6024_60240N.pdf (435.9 kB)
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| Item type | 会議発表論文 / Conference Paper(1) | |||||
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| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Vibration insensitive interferometer using sinusoidal phase-modulation and feedback control | |||||
| タイトル | ||||||
| タイトル | Vibration insensitive interferometer using sinusoidal phase-modulation and feedback control | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | interferometer | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | vibration compensation | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | surface profile measurement | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | sinusoidal phase modulation | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| 著者 |
Sasaki, Osami
× Sasaki, Osami× Iwai, Hidetaka× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | It is easy to extract a signal proportional to a phase fluctuation from a sinusoidally phase-modulated interference signal. This fluctuation is caused by mechanical vibration or air turbulence. In a sinusoidal phase-modulating interferometer using a laser diode (LD) the phase fluctuation is reduced by changing the injection current of the LD with a feedback control system. This control is very useful to a Fizeau type interferometer for surface profile measurement of a large size object. IC wafers of 100 mm diameter are measured with an interferometer insensitive to mechanical vibration and air turbulence. The phase fluctuation with nearly constant amplitude which corresponds to 30nm in surface height is reduced by about 10%. However the reduction in the phase fluctuation is not performed well for an instantaneous and large phase fluctuation. In order to be insensitive to all kinds of phase fluctuations the feedback signal is always observed, so that the interference signal is captured when the amplitude of the feedback signal is less than a specified level during the capturing time of 0.53 s. Thus surface profiles of the IC wafers can be measured with a high repeatability of a few nm even when any kind of vibration exists. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | ICO20: optical devices and instruments : 21-26 August 2005 : Changchun, China. : Aug 2005, Changchun, China | |||||
| 書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 6024, p. 60240N-1-60240N-6, 発行日 2005-08 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0277786X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10619755 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.666829 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
