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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Vibration insensitive interferometer using sinusoidal phase-modulation and feedback control

http://hdl.handle.net/10191/27491
http://hdl.handle.net/10191/27491
6178ff8e-b50c-4bed-ac42-8378faf5ac3a
名前 / ファイル ライセンス アクション
6024_60240N.pdf 6024_60240N.pdf (435.9 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Vibration insensitive interferometer using sinusoidal phase-modulation and feedback control
タイトル
言語 en
タイトル Vibration insensitive interferometer using sinusoidal phase-modulation and feedback control
言語
言語 eng
キーワード
主題Scheme Other
主題 interferometer
キーワード
主題Scheme Other
主題 vibration compensation
キーワード
主題Scheme Other
主題 surface profile measurement
キーワード
主題Scheme Other
主題 sinusoidal phase modulation
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 169434

Sasaki, Osami

Search repository
Iwai, Hidetaka

× Iwai, Hidetaka

WEKO 169435

Iwai, Hidetaka

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 It is easy to extract a signal proportional to a phase fluctuation from a sinusoidally phase-modulated interference signal. This fluctuation is caused by mechanical vibration or air turbulence. In a sinusoidal phase-modulating interferometer using a laser diode (LD) the phase fluctuation is reduced by changing the injection current of the LD with a feedback control system. This control is very useful to a Fizeau type interferometer for surface profile measurement of a large size object. IC wafers of 100 mm diameter are measured with an interferometer insensitive to mechanical vibration and air turbulence. The phase fluctuation with nearly constant amplitude which corresponds to 30nm in surface height is reduced by about 10%. However the reduction in the phase fluctuation is not performed well for an instantaneous and large phase fluctuation. In order to be insensitive to all kinds of phase fluctuations the feedback signal is always observed, so that the interference signal is captured when the amplitude of the feedback signal is less than a specified level during the capturing time of 0.53 s. Thus surface profiles of the IC wafers can be measured with a high repeatability of a few nm even when any kind of vibration exists.
内容記述
内容記述タイプ Other
内容記述 ICO20: optical devices and instruments : 21-26 August 2005 : Changchun, China. : Aug 2005, Changchun, China
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 6024, p. 60240N-1-60240N-6, 発行日 2005-08
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.666829
権利
権利情報 Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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