{"_buckets": {"deposit": "32722287-5ced-4fc2-bfff-73d4af66df64"}, "_deposit": {"id": "31041", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "31041"}, "status": "published"}, "_oai": {"id": "oai:niigata-u.repo.nii.ac.jp:00031041"}, "item_8_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2005-08", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "602409-6", "bibliographicPageStart": "602409-1", "bibliographicVolumeNumber": "6024", "bibliographic_titles": [{"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering"}, {"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering", "bibliographic_titleLang": "en"}]}]}, "item_8_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "We propose a sinusoidal wavelength scanning interferometer for measuring thickness and surfaces profiles with a thin film. An acousto-optic tunable filter (AOTF) is used to produce sinusoidally wavelength-scanned light from a superluminescent laser diode (SLD) with a wide spectral bandwidth of 46nm. The interference signal contains an amplitude Zb of a time-varying phase and a constant phase \u03b1. Two measured values of OPD, which are denoted by Lz and L\u03b1, are obtained from Zb and \u03b1. By combining Lz and L\u03b1, an OPD longer than a wavelength is measured with an error less than a few nanometers. When the object has two reflective surfaces, the detected interference signal contains two interference signals which are caused by the front and rear surfaces. In this case we must determine the values of Zb1, Zb2, \u03b11, and \u03b12, where suffixes of 1 and 2 are corresponding to the front and rear surfaces, respectively. We define an error function that is the difference between the detected signal and the theoretical signal, and reduce the value of the error function with the multidimensional nonlinear least-squares algorithm to search the values of Zb1, Zb2, \u03b11, and \u03b12. Experimental results show that the thickness and surfaces profiles of a silica glass plate of 20\u03bcm-thickness are measured with error less than 1.5nm.", "subitem_description_type": "Abstract"}]}, "item_8_description_5": {"attribute_name": "\u5185\u5bb9\u8a18\u8ff0", "attribute_value_mlt": [{"subitem_description": "ICO20: optical devices and instruments : 21-26 August 2005 : Changchun, China. : Aug 2005, Changchun, China", "subitem_description_type": "Other"}]}, "item_8_publisher_7": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "International Society for Optical Engineering, SPIE"}]}, "item_8_relation_14": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "info:doi/10.1117/12.666811", "subitem_relation_type_select": "DOI"}}]}, "item_8_rights_15": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited."}]}, "item_8_select_19": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_8_source_id_11": {"attribute_name": "\u66f8\u8a8c\u30ec\u30b3\u30fc\u30c9ID", "attribute_value_mlt": [{"subitem_source_identifier": "AA10619755", "subitem_source_identifier_type": "NCID"}]}, "item_8_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0277786X", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Akiyama, Hisashi"}], "nameIdentifiers": [{"nameIdentifier": "169428", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sasaki, Osami"}], "nameIdentifiers": [{"nameIdentifier": "169429", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Suzuki, Takamasa"}], "nameIdentifiers": [{"nameIdentifier": "39", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-08-26"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "6024_602409.pdf", "filesize": [{"value": "519.9 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 519900.0, "url": {"label": "6024_602409.pdf", "url": "https://niigata-u.repo.nii.ac.jp/record/31041/files/6024_602409.pdf"}, "version_id": "e5553ca1-5f15-4bf4-b609-2ba9b2a50078"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "Interferometer", "subitem_subject_scheme": "Other"}, {"subitem_subject": "surface profile", "subitem_subject_scheme": "Other"}, {"subitem_subject": "thickness", "subitem_subject_scheme": "Other"}, {"subitem_subject": "wavelength-scanning", "subitem_subject_scheme": "Other"}, {"subitem_subject": "sinusoidal phase-modulation", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "Sinusoidal wavelength-scanning interferometer for measurement of thickness and surface profile of thin films", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Sinusoidal wavelength-scanning interferometer for measurement of thickness and surface profile of thin films"}, {"subitem_title": "Sinusoidal wavelength-scanning interferometer for measurement of thickness and surface profile of thin films", "subitem_title_language": "en"}]}, "item_type_id": "8", "owner": "1", "path": ["453/457", "423/435/1827"], "permalink_uri": "http://hdl.handle.net/10191/27483", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2014-06-20"}, "publish_date": "2014-06-20", "publish_status": "0", "recid": "31041", "relation": {}, "relation_version_is_last": true, "title": ["Sinusoidal wavelength-scanning interferometer for measurement of thickness and surface profile of thin films"], "weko_shared_id": null}