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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Sinusoidal wavelength-scanning interferometer for measurement of thickness and surface profile of thin films

http://hdl.handle.net/10191/27483
http://hdl.handle.net/10191/27483
862d84ca-1dfa-4d86-951d-5cef08221e95
名前 / ファイル ライセンス アクション
6024_602409.pdf 6024_602409.pdf (519.9 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Sinusoidal wavelength-scanning interferometer for measurement of thickness and surface profile of thin films
タイトル
言語 en
タイトル Sinusoidal wavelength-scanning interferometer for measurement of thickness and surface profile of thin films
言語
言語 eng
キーワード
主題Scheme Other
主題 Interferometer
キーワード
主題Scheme Other
主題 surface profile
キーワード
主題Scheme Other
主題 thickness
キーワード
主題Scheme Other
主題 wavelength-scanning
キーワード
主題Scheme Other
主題 sinusoidal phase-modulation
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Akiyama, Hisashi

× Akiyama, Hisashi

WEKO 169428

Akiyama, Hisashi

Search repository
Sasaki, Osami

× Sasaki, Osami

WEKO 169429

Sasaki, Osami

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 We propose a sinusoidal wavelength scanning interferometer for measuring thickness and surfaces profiles with a thin film. An acousto-optic tunable filter (AOTF) is used to produce sinusoidally wavelength-scanned light from a superluminescent laser diode (SLD) with a wide spectral bandwidth of 46nm. The interference signal contains an amplitude Zb of a time-varying phase and a constant phase α. Two measured values of OPD, which are denoted by Lz and Lα, are obtained from Zb and α. By combining Lz and Lα, an OPD longer than a wavelength is measured with an error less than a few nanometers. When the object has two reflective surfaces, the detected interference signal contains two interference signals which are caused by the front and rear surfaces. In this case we must determine the values of Zb1, Zb2, α1, and α2, where suffixes of 1 and 2 are corresponding to the front and rear surfaces, respectively. We define an error function that is the difference between the detected signal and the theoretical signal, and reduce the value of the error function with the multidimensional nonlinear least-squares algorithm to search the values of Zb1, Zb2, α1, and α2. Experimental results show that the thickness and surfaces profiles of a silica glass plate of 20μm-thickness are measured with error less than 1.5nm.
内容記述
内容記述タイプ Other
内容記述 ICO20: optical devices and instruments : 21-26 August 2005 : Changchun, China. : Aug 2005, Changchun, China
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 6024, p. 602409-1-602409-6, 発行日 2005-08
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.666811
権利
権利情報 Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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