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In this paper the improvement is carried out under two processes; namely, a process to improve the measurement accuracy of the elongation, in which it is eliminated the influences due to inertia force of table at the stroke ends and due to thermal elongation of the displacement measuring system during experiment, and another process to improve the estimation accuracy of the elongation, in which the longitudinal temperature distribution of the ball-screw is measured in detail at fifteen points by the optical telemeter system developed. It is clarified that the estimation accuracy of -2.50\u301c+2.58\u03bcm is accomplished under several conditions less than 20m/min table speed.", "subitem_description_type": "Abstract"}]}, "item_5_full_name_3": {"attribute_name": "\u8457\u8005\u5225\u540d", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "40803", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Kosaka, Takashi"}]}, {"nameIdentifiers": [{"nameIdentifier": "40804", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Yokoyama, Kazuhiro"}]}, {"nameIdentifiers": [{"nameIdentifier": "40805", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Saito, Koji"}]}, {"nameIdentifiers": [{"nameIdentifier": "39", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Suzuki, Takamasa"}]}]}, "item_5_publisher_7": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "\u7cbe\u5bc6\u5de5\u5b66\u4f1a"}]}, "item_5_relation_14": {"attribute_name": "DOI", "attribute_value_mlt": 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