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Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film
http://hdl.handle.net/10191/27528
http://hdl.handle.net/10191/2752864ac8e8e-0c80-46ec-96e6-10eec46aad29
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
13_25_10066-10074.pdf (1.3 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film | |||||
| タイトル | ||||||
| タイトル | Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Akiyama, Hisashi
× Akiyama, Hisashi× Sasaki, Osami× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A sinusoidal wavelength-scanning interferometer for measuring thickness and surfaces profiles of a thin film has been proposed in which a superluminescent laser diode and an acousto-optic tunable filter are used. The interference signal contains an amplitude Zb of a time-varying phase and a constant phase α. Two values of an optical path difference (OPD) obtained from Zb and α, respectively, are combined to measure an OPD longer than a wavelength. The values of Zb and α are estimated by minimizing the difference between the detected signals and theoretical ones. From the estimated values, thickness and surface of a silicon dioxide film coated on an IC wafer with different thicknesses of 1 μm and 4 μm are measured with an error less than 5 nm. | |||||
| 書誌情報 |
Optics Express en : Optics Express 巻 13, 号 25, p. 10066-10074, 発行日 2005-12 |
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| 出版者 | ||||||
| 出版者 | Optical Society of America | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 10944087 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1364/OPEX.13.010066 | |||||
| 権利 | ||||||
| 権利情報 | © 2005 Optical Society of America | |||||
| 権利 | ||||||
| 権利情報 | This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OPEX.13.010066. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Akiyama, Hisashi, Sasaki, Osami, Suzuki, Takamasa, 2005, Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film: Optical Society of America, 10066–10074 p.
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