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In-process inspection of surface-profile properties by detecting a laser beam deflection
http://hdl.handle.net/10191/27600
http://hdl.handle.net/10191/27600c7adf897-b033-4491-82e2-33dab48f7c64
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
45_1_013601.pdf (508.0 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | In-process inspection of surface-profile properties by detecting a laser beam deflection | |||||
| タイトル | ||||||
| タイトル | In-process inspection of surface-profile properties by detecting a laser beam deflection | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | in-process inspection | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | surface profile | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | fast scanning | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | slope measurement | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Sasaki, Osami
× Sasaki, Osami× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | An inspection system for the surface-profile properties of an organic photoconductor (OPC) drum substrate is studied. Defective substrates have approximately 1-mm-period waves in their surface profiles along the axial direction. The slope distribution of the surface profile is measured with an optical inspection system, which detects the angular deflection of a laser beam scanned over the surface at a high speed of 15 mm/ms. To discriminate between good and defective substrates, a threshold decision is made on components of the experimentally measured power spectrum of the slope distribution around 1-mm spatial period. The inspection system provides the same results as visual inspection with an accuracy better than 6σ. The setup dose not require any vibration isolators, because of its short inspection time of 2 ms. | |||||
| 書誌情報 |
Optical Engineering en : Optical Engineering 巻 45, 号 1, p. 013601-1-013601-5, 発行日 2006-01 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00913286 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00333891 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/1.2150821 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Sasaki, Osami, Suzuki, Takamasa, 2006, In-process inspection of surface-profile properties by detecting a laser beam deflection: International Society for Optical Engineering, SPIE, 013601-1-013601-5 p.
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