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Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect
http://hdl.handle.net/10191/31210
http://hdl.handle.net/10191/31210aed0a263-b162-48dd-ad5d-87f99ee4a7ee
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
47_4_044402.pdf (692.6 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-12-24 | |||||
| タイトル | ||||||
| タイトル | Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect | |||||
| タイトル | ||||||
| タイトル | Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | guided-wave optics | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | pressure sensor | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | diaphragm | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | glass waveguide | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | elasto-optic effect | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Ohkawa, Masashi
× Ohkawa, Masashi× Sato, Takashi |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We experimentally investigated the relationship between sensitivity and diaphragm thickness in a glass-based guided-wave optical pressure sensor using intermodal interference between the fundamental TM-like and TE-like modes. The sensor consists of a rectangular diaphragm and a straight single-mode waveguide on the diaphragm. The sensitivity is theoretically known to be inversely proportional to the square of the diaphragm thickness. In this study, to examine this relationship, four sensors with diaphragm thicknesses of 0.30 mm, 0.22 mm, 0.20 mm, and 0.15 mm were fabricated. The area of the diaphragm was 10 mm×10 mm. For the waveguide position nearest to the center of the diaphragm, the measured sensitivities almost agreed with the theoretical ones. | |||||
| 書誌情報 |
Optical Engineering en : Optical Engineering 巻 47, 号 4, p. 044402-1-044402-5, 発行日 2008-04 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00913286 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00333891 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/1.2909669 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 2008 Society of Photo-Optical Instrumentation Engineers | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Ohkawa, Masashi, Sato, Takashi, 2008, Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect: International Society for Optical Engineering, SPIE, 044402-1-044402-5 p.
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