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Phase locked laser diode interferometry for surface profile measurement
http://hdl.handle.net/10191/27501
http://hdl.handle.net/10191/275014f0dc45a-5698-4dc4-bc13-2f2b5c65f40e
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
28_20_4407-4410.pdf (406.3 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Phase locked laser diode interferometry for surface profile measurement | |||||
| タイトル | ||||||
| タイトル | Phase locked laser diode interferometry for surface profile measurement | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Sasaki, Osami× Maruyama, Takeo |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We propose a new type phase locked interferometer which uses tunability of the wavelength of a laser diode. The phase lock is achieved by controlling the injection current of the laser diode. A CCD image sensor is used as a photodetector to scan electrically a measuring point along the surface of the object. Since this interferometer uses no mechanical elements such as a piezoelectric transducer and galvanomirror, the measurement accuracy is not limited by the mechanical properties. The characteristics of the feedback control system for the phase lock are examined through measurements of surface profiles of the diamond-turned aluminum disks. | |||||
| 書誌情報 |
Applied Optics en : Applied Optics 巻 28, 号 20, p. 4407-4410, 発行日 1989-10 |
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| 出版者 | ||||||
| 出版者 | Optical Society of America | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00036935 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00543409 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1364/AO.28.004407 | |||||
| 権利 | ||||||
| 権利情報 | © 1989 Optical Society of America | |||||
| 権利 | ||||||
| 権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.28.004407. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Suzuki, Takamasa, Sasaki, Osami, Maruyama, Takeo, 1989, Phase locked laser diode interferometry for surface profile measurement: Optical Society of America, 4407–4410 p.
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