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  1. 060 工学部
  2. 10 学術雑誌論文
  3. 10 査読済論文
  1. 0 資料タイプ別
  2. 01 学術雑誌論文

Differential type of phase-locked laser diode interferometer free from external disturbance

http://hdl.handle.net/10191/27513
http://hdl.handle.net/10191/27513
614d3d52-bca3-458c-b29e-ce104bd1697a
名前 / ファイル ライセンス アクション
31_34_7242-7248.pdf 31_34_7242-7248.pdf (693.2 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2014-06-20
タイトル
タイトル Differential type of phase-locked laser diode interferometer free from external disturbance
タイトル
言語 en
タイトル Differential type of phase-locked laser diode interferometer free from external disturbance
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

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Sasaki, Osami

× Sasaki, Osami

WEKO 4208

Sasaki, Osami

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Higuchi, Katsuhiro

× Higuchi, Katsuhiro

WEKO 4209

Higuchi, Katsuhiro

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Maruyama, Takeo

× Maruyama, Takeo

WEKO 4210

Maruyama, Takeo

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抄録
内容記述タイプ Abstract
内容記述 A phase-locked laser diode interferometer with differential detection to eliminate external disturbance is proposed. In this interferometer, the measurements are implemented at two different points at the same time. The surface profile that contains the disturbance is obtained at the scanned measuring point, and the disturbance is obtained at the fixed measuring point. The exact profile is obtained by subtracting the latter from the former. The limitations and characteristics are examined theoretically. The analytical results agree well with the experimental results. The repeated measurement accuracy is estimated to be ~5 nm in this interferometer.
書誌情報 Applied Optics
en : Applied Optics

巻 31, 号 34, p. 7242-7248, 発行日 1992-12
出版者
出版者 Optical Society of America
ISSN
収録物識別子タイプ ISSN
収録物識別子 00036935
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00543409
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1364/AO.31.007242
権利
権利情報 © 1992 Optical Society of America
権利
権利情報 This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.31.007242. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
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