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Differential type of phase-locked laser diode interferometer free from external disturbance
http://hdl.handle.net/10191/27513
http://hdl.handle.net/10191/27513614d3d52-bca3-458c-b29e-ce104bd1697a
名前 / ファイル | ライセンス | アクション |
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31_34_7242-7248.pdf (693.2 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Differential type of phase-locked laser diode interferometer free from external disturbance | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Differential type of phase-locked laser diode interferometer free from external disturbance | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Sasaki, Osami× Higuchi, Katsuhiro× Maruyama, Takeo |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A phase-locked laser diode interferometer with differential detection to eliminate external disturbance is proposed. In this interferometer, the measurements are implemented at two different points at the same time. The surface profile that contains the disturbance is obtained at the scanned measuring point, and the disturbance is obtained at the fixed measuring point. The exact profile is obtained by subtracting the latter from the former. The limitations and characteristics are examined theoretically. The analytical results agree well with the experimental results. The repeated measurement accuracy is estimated to be ~5 nm in this interferometer. | |||||
書誌情報 |
Applied Optics en : Applied Optics 巻 31, 号 34, p. 7242-7248, 発行日 1992-12 |
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出版者 | ||||||
出版者 | Optical Society of America | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00036935 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543409 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1364/AO.31.007242 | |||||
権利 | ||||||
権利情報 | © 1992 Optical Society of America | |||||
権利 | ||||||
権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.31.007242. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
著者版フラグ | ||||||
値 | publisher |