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  1. 060 工学部
  2. 10 学術雑誌論文
  3. 10 査読済論文
  1. 0 資料タイプ別
  2. 01 学術雑誌論文

Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer

http://hdl.handle.net/10191/27511
http://hdl.handle.net/10191/27511
96ac5cfb-afe2-4115-9b54-2d7419ca1471
名前 / ファイル ライセンス アクション
39_16_2646-2652.pdf 39_16_2646-2652.pdf (666.2 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2014-06-20
タイトル
タイトル Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer
タイトル
言語 en
タイトル Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

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Kobayashi, Katsuyuki

× Kobayashi, Katsuyuki

WEKO 4178

Kobayashi, Katsuyuki

Search repository
Sasaki, Osami

× Sasaki, Osami

WEKO 4179

Sasaki, Osami

Search repository
抄録
内容記述タイプ Abstract
内容記述 A two-wavelength interferometer that uses two separate modulating currents with different phases but the same frequencies to detect a greater degree of object displacement in real time is proposed and demonstrated. The measurement error was 57 nm, roughly 1/80 of the synthetic wavelength. We have confirmed that this modulating technique enables us to equip our prototype interferometer with a simple feedback-control system that eliminates external disturbance.
書誌情報 Applied Optics
en : Applied Optics

巻 39, 号 16, p. 2646-2652, 発行日 2000-06
出版者
出版者 Optical Society of America
ISSN
収録物識別子タイプ ISSN
収録物識別子 00036935
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00543409
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1364/AO.39.002646
権利
権利情報 © 2000 Optical Society of America
権利
権利情報 This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.39.002646. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
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