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Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer
http://hdl.handle.net/10191/27511
http://hdl.handle.net/10191/2751196ac5cfb-afe2-4115-9b54-2d7419ca1471
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Kobayashi, Katsuyuki× Sasaki, Osami |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A two-wavelength interferometer that uses two separate modulating currents with different phases but the same frequencies to detect a greater degree of object displacement in real time is proposed and demonstrated. The measurement error was 57 nm, roughly 1/80 of the synthetic wavelength. We have confirmed that this modulating technique enables us to equip our prototype interferometer with a simple feedback-control system that eliminates external disturbance. | |||||
書誌情報 |
Applied Optics en : Applied Optics 巻 39, 号 16, p. 2646-2652, 発行日 2000-06 |
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出版者 | ||||||
出版者 | Optical Society of America | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00036935 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543409 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1364/AO.39.002646 | |||||
権利 | ||||||
権利情報 | © 2000 Optical Society of America | |||||
権利 | ||||||
権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.39.002646. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
著者版フラグ | ||||||
値 | publisher |