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Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation
http://hdl.handle.net/10191/27526
http://hdl.handle.net/10191/27526de6cd69c-0962-4111-aa2c-6cf395ffd96c
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
41_10_1972-1976.pdf (596.3 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation | |||||
| タイトル | ||||||
| タイトル | Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Yazawa, Takayuki× Sasaki, Osami |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We describe an interferometer system that uses two separate wavelengths to measure step height. The overlapping interference images detected by a CCD camera are easily separated by an ordinary integrating-bucket method and time-sharing sinusoidal phase modulation, in which two laser diodes are alternately modulated with a sinusoidal signal. A phase map is obtained only for the laser diode into which the modulation signal is injected. In this instance, a 1-microm step height was accurately detected. | |||||
| 書誌情報 |
Applied Optics en : Applied Optics 巻 41, 号 10, p. 1972-1976, 発行日 2002-04 |
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| 出版者 | ||||||
| 出版者 | Optical Society of America | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00036935 | |||||
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| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00543409 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1364/AO.41.001972 | |||||
| 権利 | ||||||
| 権利情報 | © 2002 Optical Society of America | |||||
| 権利 | ||||||
| 権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.41.001972. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
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| 値 | publisher | |||||
