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Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer
http://hdl.handle.net/10191/27519
http://hdl.handle.net/10191/2751939446cc4-ae6d-40d7-9976-c33e01b3b20c
名前 / ファイル | ライセンス | アクション |
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41_10_1949-1953.pdf (591.5 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Maki, Toshiyuki× Zhao, Xuefeng× Sasaki, Osami |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A surface profiler that incorporates a feedback controller to eliminate external disturbances is proposed and demonstrated. Its overall performance is dependent on the frequency response of the feedback loop. The frequency of the modulating signal strongly inlfluences the response of the feedback controller. When we used the integrating-bucket method, the CCD camera had to be operated at a low-frequency video rate. Our technique uses a CCD camera equipped with an electronic shutter. The shutter function enables us to apply high-speed sinusoidal pilase modulation to the conventional integrating-bucket method under the standard video rate. | |||||
書誌情報 |
Applied Optics en : Applied Optics 巻 41, 号 10, p. 1949-1953, 発行日 2002-04 |
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出版者 | ||||||
出版者 | Optical Society of America | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00036935 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543409 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1364/AO.41.001949 | |||||
権利 | ||||||
権利情報 | © 2002 Optical Society of America | |||||
権利 | ||||||
権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.41.001949. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
著者版フラグ | ||||||
値 | publisher |