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  1. 060 工学部
  2. 10 学術雑誌論文
  3. 10 査読済論文
  1. 0 資料タイプ別
  2. 01 学術雑誌論文

Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer

http://hdl.handle.net/10191/27519
http://hdl.handle.net/10191/27519
39446cc4-ae6d-40d7-9976-c33e01b3b20c
名前 / ファイル ライセンス アクション
41_10_1949-1953.pdf 41_10_1949-1953.pdf (591.5 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2014-06-20
タイトル
タイトル Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer
タイトル
言語 en
タイトル Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

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Maki, Toshiyuki

× Maki, Toshiyuki

WEKO 4161

Maki, Toshiyuki

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Zhao, Xuefeng

× Zhao, Xuefeng

WEKO 4162

Zhao, Xuefeng

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Sasaki, Osami

× Sasaki, Osami

WEKO 4163

Sasaki, Osami

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抄録
内容記述タイプ Abstract
内容記述 A surface profiler that incorporates a feedback controller to eliminate external disturbances is proposed and demonstrated. Its overall performance is dependent on the frequency response of the feedback loop. The frequency of the modulating signal strongly inlfluences the response of the feedback controller. When we used the integrating-bucket method, the CCD camera had to be operated at a low-frequency video rate. Our technique uses a CCD camera equipped with an electronic shutter. The shutter function enables us to apply high-speed sinusoidal pilase modulation to the conventional integrating-bucket method under the standard video rate.
書誌情報 Applied Optics
en : Applied Optics

巻 41, 号 10, p. 1949-1953, 発行日 2002-04
出版者
出版者 Optical Society of America
ISSN
収録物識別子タイプ ISSN
収録物識別子 00036935
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00543409
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1364/AO.41.001949
権利
権利情報 © 2002 Optical Society of America
権利
権利情報 This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.41.001949. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
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