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Multiperiod fringe projection interferometry using a backpropagation method for surface profile measurement
http://hdl.handle.net/10191/27515
http://hdl.handle.net/10191/275157d664b2b-24f5-4e9a-adb1-188e614bc8e1
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
46_29_7268-7274.pdf (823.7 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Multiperiod fringe projection interferometry using a backpropagation method for surface profile measurement | |||||
| タイトル | ||||||
| タイトル | Multiperiod fringe projection interferometry using a backpropagation method for surface profile measurement | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Huan, Hai
× Huan, Hai× Sasaki, Osami× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Interference fringes with different periods are projected on an object surface. There is a constant phase point where the phase of the fringe is kept at a constant value while the period is scanning. Multiple optical fields with different periods on the object surface are made from detected phases of the fringes. The multiple optical fields are backpropagated to the constant phase point of the phase where all of the phases of the multiple backpropagated fields become the same value and the amplitude of the sum of the multiple backpropagated fields becomes maximum. The distance of the backpropagation provides the position of the object surface. Some experiments show that this method can measure an object surface with discontinuities of several millimeters with high accuracy of several micrometers. | |||||
| 書誌情報 |
Applied Optics en : Applied Optics 巻 46, 号 29, p. 7268-7274, 発行日 2007-08 |
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| 出版者 | ||||||
| 出版者 | Optical Society of America | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00036935 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00543409 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1364/AO.46.007268 | |||||
| 権利 | ||||||
| 権利情報 | © 2007 Optical Society of America | |||||
| 権利 | ||||||
| 権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.46.007268. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Huan, Hai, Sasaki, Osami, Suzuki, Takamasa, 2007, Multiperiod fringe projection interferometry using a backpropagation method for surface profile measurement: Optical Society of America, 7268–7274 p.
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