@article{oai:niigata-u.repo.nii.ac.jp:00006858,
 author = {Kawabata, Hiroshi and Shimura, Toshiaki and Sato, Makoto},
 journal = {Science reports of Niigata University. (Geology), Science reports of Niigata University. (Geology)},
 month = {Mar},
 note = {This paper describes the sources of error and the methods for quantitative analysis using an energy-dispersive X-ray spectrometer. On the probe current correction method used in this system, the accuracy is significantly affected by the intensity of the cobalt Ka line. A 1% difference in cobalt intensity or probe current shifts the oxide concentration by about 1%. Therefore, calibration using the appropriate X-ray intensity of cobalt and a steady probe current are essential in obtaining satisfactory results. Another potential error source is distortion of the spectrum caused by characteristics of the semiconductor detector. Although the sum peak and escape peak can be avoided by careful identification of the peaks, silicon internal fluorescence X-ray is not distinguishable from the original Si Kα emanating from the sample, and causes an overestimation of about 0.15% Si. Since incomplete charge collection also overestimates concentration, especially for low energy elements, correction for incomplete charge collection is required to analyze low energy trace elements accurately. Analytical results of minerals and a glass indicate that oxides with concentrations >0.7% can be analyzed with a less than 10% RSD (relative standard deviation), and are in agreement with the results using the wavelengthdispersive X-ray spectrometer.},
 pages = {1--13},
 title = {Quantitative analysis of rock-forming minerals using the energy-dispersive X-ray spectrometer},
 volume = {19},
 year = {2004}
}