{"created":"2021-03-01T06:07:40.131569+00:00","id":3890,"links":{},"metadata":{"_buckets":{"deposit":"988c765e-090b-40ea-94b6-a718abbe8fa1"},"_deposit":{"id":"3890","owners":[],"pid":{"revision_id":0,"type":"depid","value":"3890"},"status":"published"},"_oai":{"id":"oai:niigata-u.repo.nii.ac.jp:00003890","sets":["423:424:425","453:454"]},"item_5_alternative_title_1":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Experimental and Numerical Analyses of Change in Shape of Vacuum Chuck Surface due to Centrifugal Force"}]},"item_5_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1991-10","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"542","bibliographicPageEnd":"3285","bibliographicPageStart":"3280","bibliographicVolumeNumber":"57","bibliographic_titles":[{"bibliographic_title":"日本機械学会論文集. C編"},{"bibliographic_title":"日本機械学会論文集. C編","bibliographic_titleLang":"en"}]}]},"item_5_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"This paper deals with the change in shape of the front surface of vacuum chuck employed for ultra precision machining due to the centrifugal force generated by the rotation of the spindle. Displacement, change in shape of the front surface and the diametrical expansion of the chuck made of aluminum are analysed experimentally under several contact conditions. Deformation analyses of the chuck by FEM based on several models for the ordinary contact condition are also carried out to compare with the experimental result. It is clarified that the axial and radial deformations of the aluminum chuck agree well between the experiment and the FEM analysis based on a model with fixed contacts at the interface between the chuck and the spindle. Deformation of another type of chuck consisting of a combination of steel and aluminum parts is also analysed.","subitem_description_type":"Abstract"}]},"item_5_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"45986","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Yokoyama, Kazuhiro"}]},{"nameIdentifiers":[{"nameIdentifier":"45987","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Kobayashi, Keiji"}]},{"nameIdentifiers":[{"nameIdentifier":"45988","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Moriwaki, Toshimichi"}]},{"nameIdentifiers":[{"nameIdentifier":"45989","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Suzuki, Kenji"}]}]},"item_5_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"日本機械学会"}]},"item_5_relation_31":{"attribute_name":"異版である","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"http://ci.nii.ac.jp/naid/110002392666","subitem_relation_type_select":"URI"}}]},"item_5_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"日本機械学会"},{"subitem_rights":"本文データは学会の許諾に基づくCiNiiからの複製である"}]},"item_5_select_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_5_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00187463","subitem_source_identifier_type":"NCID"}]},"item_5_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"03875024","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"横山, 和宏"}],"nameIdentifiers":[{"nameIdentifier":"45982","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小林, 敬司"}],"nameIdentifiers":[{"nameIdentifier":"45983","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"森脇, 俊道"}],"nameIdentifiers":[{"nameIdentifier":"45984","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"鈴木, 賢治"}],"nameIdentifiers":[{"nameIdentifier":"45985","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-07-30"}],"displaytype":"detail","filename":"9_0092.pdf","filesize":[{"value":"443.2 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"9_0092.pdf","url":"https://niigata-u.repo.nii.ac.jp/record/3890/files/9_0092.pdf"},"version_id":"c33b9f47-7095-4a71-b0ba-f7ba8ad696d8"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Ultra Precision Machining","subitem_subject_scheme":"Other"},{"subitem_subject":"Contact Problem","subitem_subject_scheme":"Other"},{"subitem_subject":"Modeling","subitem_subject_scheme":"Other"},{"subitem_subject":"Finite-Element Method","subitem_subject_scheme":"Other"},{"subitem_subject":"Chuck","subitem_subject_scheme":"Other"},{"subitem_subject":"Centrifugal Force","subitem_subject_scheme":"Other"},{"subitem_subject":"Deformation","subitem_subject_scheme":"Other"},{"subitem_subject":"Interface","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"遠心力による真空チャック面変形の実験およびFEM解析 （超精密加工と超精密工作機械<特集>）","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"遠心力による真空チャック面変形の実験およびFEM解析 （超精密加工と超精密工作機械<特集>）"},{"subitem_title":"遠心力による真空チャック面変形の実験およびFEM解析 （超精密加工と超精密工作機械<特集>）","subitem_title_language":"en"}]},"item_type_id":"5","owner":"1","path":["454","425"],"pubdate":{"attribute_name":"公開日","attribute_value":"2008-04-08"},"publish_date":"2008-04-08","publish_status":"0","recid":"3890","relation_version_is_last":true,"title":["遠心力による真空チャック面変形の実験およびFEM解析 （超精密加工と超精密工作機械<特集>）"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-15T03:36:56.146985+00:00"}