WEKO3
アイテム
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AlCl_3とNH_3の気相反応によるAlN微粉末の合成
http://hdl.handle.net/10191/21886
http://hdl.handle.net/10191/21886a434d7c6-21d8-41a9-a135-9d094f32766b
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2013-04-18 | |||||
タイトル | ||||||
タイトル | AlCl_3とNH_3の気相反応によるAlN微粉末の合成 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | AlCl_3とNH_3の気相反応によるAlN微粉末の合成 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | AlN | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | AlCl_3 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | NH_3 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Vapor phase reaction | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Fine AlN powder | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
その他のタイトル | ||||||
その他のタイトル | Synthesis of fine AlN powder by vapor phase reaction of AlCl_3 and NH_3 | |||||
著者 |
木村, 勇雄
× 木村, 勇雄× 堀田, 憲康× 温井, 秀樹× 齋藤, 夏風× 安川, 三郎 |
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著者別名 | ||||||
識別子 | 43700 | |||||
識別子Scheme | WEKO | |||||
姓名 | Kimura, Isao | |||||
著者別名 | ||||||
識別子 | 43701 | |||||
識別子Scheme | WEKO | |||||
姓名 | Hotta, Noriyasu | |||||
著者別名 | ||||||
識別子 | 43702 | |||||
識別子Scheme | WEKO | |||||
姓名 | Nukui, Hideki | |||||
著者別名 | ||||||
識別子 | 43703 | |||||
識別子Scheme | WEKO | |||||
姓名 | Saito, Natsukaze | |||||
著者別名 | ||||||
識別子 | 43704 | |||||
識別子Scheme | WEKO | |||||
姓名 | Yasukawa, Saburo | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Fine AlN powder was synthesized by vapor phase reaction of AlCl_3 and NH_3 at 720°-1190°C. Most of the powder deposited separately in two regions in the reactor. The powder deposited in the range between the end of AlCl_3-feeding tube and the point 17cm apart there from consisted of one phase AlN. The particle size and its distribution became fine and uniform at high reaction temperature or at high total flow rate of NH_3 and N_2. Fine powder with the median diameter of 0.16μm was synthesized at 1190°C and particles were within a narrow range from 0.1 to 3.0μm. In the range between 20 and 33cm apart from the end of the AlCl_3-feeding tube, amorphous AlN deposited, which crystallized on heating at 1400°C. Byproduct, NH_4Cl which coexisted with amorphous AlN, was easily eliminated by heating at 500°C. The formation rate of crystalline AlN was 2.2g·h^-1 and the total yield of crystalline and amorphous AlN was 79%. | |||||
書誌情報 |
日本セラミックス協会学術論文誌 en : 日本セラミックス協会学術論文誌 巻 96, 号 2, p. 206-210, 発行日 1988-12 |
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出版者 | ||||||
出版者 | 日本セラミックス協会 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 09145400 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN10040326 | |||||
著者版フラグ | ||||||
値 | publisher |