@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031292, author = {Badsha, Md. Syef Bin and Sasaki, Osami and Choi, Samuel and Suzuki, Takamasa}, book = {電気学会東京支部新潟支所研究発表会予稿集, 電気学会東京支部新潟支所研究発表会予稿集}, month = {Nov}, pages = {78--78}, publisher = {電気学会東京支部新潟支所}, title = {Sinusoidal waveleangth-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations}, volume = {21}, year = {2011} }