@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031074, author = {Sasaki, Osami and Takahashi, Kazuhide and Suzuki, Takamasa}, book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering}, month = {Nov}, note = {We propose a sinusoidal phase modulating laser diode interferometer which is insensitivity to vibrations of optical devices and fluctuations in the optical wavelength of the laser diode. We analyze the sinusoidal phase modulation in a laser diode interferometer, and describe the principle of the feedback control of the injection current of the laser diode to eliminate the fluctuations in the phase of the interference signal caused by external disturbances. We construct two sinusoidal phase modulating interferometers for movement measurements and surface profile measurements, respectively. The experimental results make it clear that the interferometers can be used in mechanically noisy circumstances., Fringe pattern analysis : Conference : Aug 1989, San Diego, CA}, pages = {14--21}, publisher = {International Society for Optical Engineering, SPIE}, title = {Sinusoidal phase modulating laser diode interferometer with feedback control system to eliminate external disturbance}, volume = {1163}, year = {1989} }