@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031068,
 author = {Sasaki, Osami and Tsuji, Kenichiro and Sato, Shouichi and Kuwahara, Tomokazu and Suzuki, Takamasa},
 book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering},
 month = {Jun},
 note = {In sinusoidal phase-modulating interferometry an optical path length (OPD) larger than a wavelength is measured by detecting sinusoidal phase-modulation amplitude of the interference signal. This interference signal is produced by scanning sinusoidally wavelength of a light source. If the measurement accuracy in POD is higher than half of the central wavelength, this measured value is combined with a fractional value of the OPD which is obtained from the conventional phase of the interference signal. The measurement accuracy in POD is higher as the scanning width of wavelength is larger. We propose two different methods to create a light source with a large scanning width of wavelength by using superluminenscent laser diode and external-cavity tunable laser diode. Experimental results clearly show that sinusoidal wavelength-scanning interferometers using these light sources measure an OPD over a few tens of microns with a high accuracy of a few nm., Laser interferometry 9 : International conferences : Jul 1998, San Diego, CA},
 pages = {37--44},
 publisher = {International Society for Optical Engineering, SPIE},
 title = {Sinusoidal wavelength-scanning interferometers},
 volume = {3478},
 year = {1998}
}