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Sinusoidal wavelength-scanning interferometers
http://hdl.handle.net/10191/27482
http://hdl.handle.net/10191/27482cda36525-016a-44c3-ac33-9e9531365c27
名前 / ファイル | ライセンス | アクション |
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Sinusoidal wavelength-scanning interferometers | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Sinusoidal wavelength-scanning interferometers | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_5794 | |||||
タイプ | conference paper | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Tsuji, Kenichiro× Sato, Shouichi× Kuwahara, Tomokazu× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | In sinusoidal phase-modulating interferometry an optical path length (OPD) larger than a wavelength is measured by detecting sinusoidal phase-modulation amplitude of the interference signal. This interference signal is produced by scanning sinusoidally wavelength of a light source. If the measurement accuracy in POD is higher than half of the central wavelength, this measured value is combined with a fractional value of the OPD which is obtained from the conventional phase of the interference signal. The measurement accuracy in POD is higher as the scanning width of wavelength is larger. We propose two different methods to create a light source with a large scanning width of wavelength by using superluminenscent laser diode and external-cavity tunable laser diode. Experimental results clearly show that sinusoidal wavelength-scanning interferometers using these light sources measure an OPD over a few tens of microns with a high accuracy of a few nm. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Laser interferometry 9 : International conferences : Jul 1998, San Diego, CA | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 3478, p. 37-44, 発行日 1998-06 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.312959 | |||||
権利 | ||||||
権利情報 | Copyright 1998 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
著者版フラグ | ||||||
値 | publisher |