@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031059, author = {Sasaki, Osami and Hashimoto, Kazunori and Fujimori, Yuuji and Suzuki, Takamasa}, book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering}, month = {Jun}, note = {We propose a new method for measuring a position of an endpoint of a metal cylinder in which a sinusoidal intensity distribution vibrating sinusoidally is used. The position of the endpoint is measured as a phase of a sinusoidally phase- modulated signal which is generated from a light diffracted from the endpoint. In order to extend the measurement range and measure a diameter of a metal cylinder two sinusoidal intensity distributions with two different periods of P1=100 μm and P2=98 μm are used. Cylinder diameters are exactly determined from the measurements for two endpoints of a cylinder using the two periods. Experimental results make it clear that the measurement error is less than 0.3 micrometers for a cylinder metal of 3885.2 micrometers diameter., Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001 : Yokohama, Japan. : Jun 2001, Yokohama, Japan}, pages = {35--38}, publisher = {International Society for Optical Engineering, SPIE}, title = {Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings}, volume = {4416}, year = {2001} }