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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings

http://hdl.handle.net/10191/27499
http://hdl.handle.net/10191/27499
76ee948e-e461-4af2-ad25-330d074c9fe6
名前 / ファイル ライセンス アクション
4416_35-38.pdf 4416_35-38.pdf (326.4 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings
タイトル
言語 en
タイトル Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 169490

Sasaki, Osami

Search repository
Hashimoto, Kazunori

× Hashimoto, Kazunori

WEKO 169491

Hashimoto, Kazunori

Search repository
Fujimori, Yuuji

× Fujimori, Yuuji

WEKO 169492

Fujimori, Yuuji

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 We propose a new method for measuring a position of an endpoint of a metal cylinder in which a sinusoidal intensity distribution vibrating sinusoidally is used. The position of the endpoint is measured as a phase of a sinusoidally phase- modulated signal which is generated from a light diffracted from the endpoint. In order to extend the measurement range and measure a diameter of a metal cylinder two sinusoidal intensity distributions with two different periods of P1=100 μm and P2=98 μm are used. Cylinder diameters are exactly determined from the measurements for two endpoints of a cylinder using the two periods. Experimental results make it clear that the measurement error is less than 0.3 micrometers for a cylinder metal of 3885.2 micrometers diameter.
内容記述
内容記述タイプ Other
内容記述 Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001 : Yokohama, Japan. : Jun 2001, Yokohama, Japan
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 4416, p. 35-38, 発行日 2001-06
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.427062
権利
権利情報 Copyright 2001 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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