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Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings
http://hdl.handle.net/10191/27499
http://hdl.handle.net/10191/2749976ee948e-e461-4af2-ad25-330d074c9fe6
名前 / ファイル | ライセンス | アクション |
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_5794 | |||||
タイプ | conference paper | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Hashimoto, Kazunori× Fujimori, Yuuji× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We propose a new method for measuring a position of an endpoint of a metal cylinder in which a sinusoidal intensity distribution vibrating sinusoidally is used. The position of the endpoint is measured as a phase of a sinusoidally phase- modulated signal which is generated from a light diffracted from the endpoint. In order to extend the measurement range and measure a diameter of a metal cylinder two sinusoidal intensity distributions with two different periods of P1=100 μm and P2=98 μm are used. Cylinder diameters are exactly determined from the measurements for two endpoints of a cylinder using the two periods. Experimental results make it clear that the measurement error is less than 0.3 micrometers for a cylinder metal of 3885.2 micrometers diameter. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001 : Yokohama, Japan. : Jun 2001, Yokohama, Japan | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 4416, p. 35-38, 発行日 2001-06 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.427062 | |||||
権利 | ||||||
権利情報 | Copyright 2001 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
著者版フラグ | ||||||
値 | publisher |