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An Experimental Investigation of Sensitivity Dependence with respect to Waveguide Position on a Micromachined Diaphragm in a Silicon-Based Integrated Optic Pressure Sensor
http://hdl.handle.net/10191/31189
http://hdl.handle.net/10191/3118915ca1bbf-265e-4849-974f-09889cb95408
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
4591_337-344.pdf (993.3 kB)
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| Item type | 会議発表論文 / Conference Paper(1) | |||||
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| 公開日 | 2014-12-24 | |||||
| タイトル | ||||||
| タイトル | An Experimental Investigation of Sensitivity Dependence with respect to Waveguide Position on a Micromachined Diaphragm in a Silicon-Based Integrated Optic Pressure Sensor | |||||
| タイトル | ||||||
| タイトル | An Experimental Investigation of Sensitivity Dependence with respect to Waveguide Position on a Micromachined Diaphragm in a Silicon-Based Integrated Optic Pressure Sensor | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | integrated optics | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | pressure sensor | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | elasto-optic effect | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | silicon | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | diaphragm | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_5794 | |||||
| タイプ | conference paper | |||||
| 著者 |
Goto, Takeshi
× Goto, Takeshi× Yamada, Atsushi× Ohkawa, Masashi× Sekine, Seishi× Sato, Takashi |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We have been developing a silicon-based integrated optic pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes. The sensor has a micromachined diaphragm with a sensing waveguide as a pressure-sensitive structure. The sensor is theoretically known to have a strong dependence of sensitivity on the sensing waveguide on the diaphragm. According to the theoretical prediction for the sensor based on the elasto-optic effect, the waveguide should be placed along the diaphragm edge to maximize sensitivity. To date, such dependence has not been experimentally examined in detail. In this study, two sensors with 20 or more waveguides placed at 0.1mm intervals on the diaphragm were fabricated to determine the relationship between sensitivity and waveguide position. The diaphragm dimensions were (1) 2.0mmX10mmX35micrometers and (2) 3.0mmX15mmX64micrometers . The ratio between width and length of each diaphragm was 1:5. The maximum sensitivity of 100 mrad/kPa was obtained for the waveguide nearest to the diaphragm edge with a wavelength of 633nm. In addition, the measured sensitivities were very similar for the corresponding waveguide positions in the two sensors since a scaling factor, which is defined as the cube of the either side length divided by the square of the thickness, was set as a constant. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | Electronics and structures for MEMS 2 : 17-19 December 2001 : Adelaide, Australia. : SPIE's 2001 symposium on microtechnology and MEMS : Dec 2001, Adelaide, Australia | |||||
| 書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 4591, p. 337-344, 発行日 2001-11 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0277786X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10619755 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.449164 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 2001 Society of Photo-Optical Instrumentation Engineers | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
