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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

An Experimental Investigation of Sensitivity Dependence with respect to Waveguide Position on a Micromachined Diaphragm in a Silicon-Based Integrated Optic Pressure Sensor

http://hdl.handle.net/10191/31189
http://hdl.handle.net/10191/31189
15ca1bbf-265e-4849-974f-09889cb95408
名前 / ファイル ライセンス アクション
4591_337-344.pdf 4591_337-344.pdf (993.3 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-12-24
タイトル
タイトル An Experimental Investigation of Sensitivity Dependence with respect to Waveguide Position on a Micromachined Diaphragm in a Silicon-Based Integrated Optic Pressure Sensor
タイトル
タイトル An Experimental Investigation of Sensitivity Dependence with respect to Waveguide Position on a Micromachined Diaphragm in a Silicon-Based Integrated Optic Pressure Sensor
言語 en
言語
言語 eng
キーワード
主題Scheme Other
主題 integrated optics
キーワード
主題Scheme Other
主題 pressure sensor
キーワード
主題Scheme Other
主題 elasto-optic effect
キーワード
主題Scheme Other
主題 silicon
キーワード
主題Scheme Other
主題 diaphragm
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Goto, Takeshi

× Goto, Takeshi

WEKO 169485

Goto, Takeshi

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Yamada, Atsushi

× Yamada, Atsushi

WEKO 169486

Yamada, Atsushi

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Ohkawa, Masashi

× Ohkawa, Masashi

WEKO 169487

Ohkawa, Masashi

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Sekine, Seishi

× Sekine, Seishi

WEKO 169488

Sekine, Seishi

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Sato, Takashi

× Sato, Takashi

WEKO 169489

Sato, Takashi

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抄録
内容記述タイプ Abstract
内容記述 We have been developing a silicon-based integrated optic pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes. The sensor has a micromachined diaphragm with a sensing waveguide as a pressure-sensitive structure. The sensor is theoretically known to have a strong dependence of sensitivity on the sensing waveguide on the diaphragm. According to the theoretical prediction for the sensor based on the elasto-optic effect, the waveguide should be placed along the diaphragm edge to maximize sensitivity. To date, such dependence has not been experimentally examined in detail. In this study, two sensors with 20 or more waveguides placed at 0.1mm intervals on the diaphragm were fabricated to determine the relationship between sensitivity and waveguide position. The diaphragm dimensions were (1) 2.0mmX10mmX35micrometers and (2) 3.0mmX15mmX64micrometers . The ratio between width and length of each diaphragm was 1:5. The maximum sensitivity of 100 mrad/kPa was obtained for the waveguide nearest to the diaphragm edge with a wavelength of 633nm. In addition, the measured sensitivities were very similar for the corresponding waveguide positions in the two sensors since a scaling factor, which is defined as the cube of the either side length divided by the square of the thickness, was set as a constant.
内容記述
内容記述タイプ Other
内容記述 Electronics and structures for MEMS 2 : 17-19 December 2001 : Adelaide, Australia. : SPIE's 2001 symposium on microtechnology and MEMS : Dec 2001, Adelaide, Australia
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 4591, p. 337-344, 発行日 2001-11
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.449164
権利
権利情報 Copyright 2001 Society of Photo-Optical Instrumentation Engineers
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