{"created":"2021-03-01T06:37:11.062677+00:00","id":31052,"links":{},"metadata":{"_buckets":{"deposit":"cc2bd4fc-5c6d-4299-a281-e97a8fcbe633"},"_deposit":{"id":"31052","owners":[],"pid":{"revision_id":0,"type":"depid","value":"31052"},"status":"published"},"_oai":{"id":"oai:niigata-u.repo.nii.ac.jp:00031052","sets":["423:435:1827","453:457"]},"item_8_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2002-10","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"234","bibliographicPageStart":"227","bibliographicVolumeNumber":"4919","bibliographic_titles":[{"bibliographic_title":"Proceedings of SPIE - the International Society for Optical Engineering"},{"bibliographic_title":"Proceedings of SPIE - the International Society for Optical Engineering","bibliographic_titleLang":"en"}]}]},"item_8_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"An optical path difference (OPD) and the amplitude of sinusoidal wavelength-scanning are controlled with double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. A linear CCD image sensor is used to measure one-dimensional step-profiles in real-time. Two different step profiles with a step height of 1 μm and 20 μm, respectively, are measured with the measurement error less than 8 nm. Measuring time for one measuring point is 0.04 s.","subitem_description_type":"Abstract"}]},"item_8_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. : Oct 2002, Shanghai, China","subitem_description_type":"Other"}]},"item_8_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"International Society for Optical Engineering, SPIE"}]},"item_8_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"info:doi/10.1117/12.465819","subitem_relation_type_select":"DOI"}}]},"item_8_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright 2002 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited."}]},"item_8_select_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_8_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA10619755","subitem_source_identifier_type":"NCID"}]},"item_8_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0277786X","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Sasaki, Osami"}],"nameIdentifiers":[{"nameIdentifier":"169467","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Honma, Kunihiro"}],"nameIdentifiers":[{"nameIdentifier":"169468","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Suzuki, Takamasa"}],"nameIdentifiers":[{"nameIdentifier":"39","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-08-26"}],"displaytype":"detail","filename":"4919_227-234.pdf","filesize":[{"value":"622.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"4919_227-234.pdf","url":"https://niigata-u.repo.nii.ac.jp/record/31052/files/4919_227-234.pdf"},"version_id":"825a5805-fdea-429d-91f2-0f18b3a042f5"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"interferometer","subitem_subject_scheme":"Other"},{"subitem_subject":"wavelength-scanning","subitem_subject_scheme":"Other"},{"subitem_subject":"step-profile measurement","subitem_subject_scheme":"Other"},{"subitem_subject":"feedback control","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile"},{"subitem_title":"Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile","subitem_title_language":"en"}]},"item_type_id":"8","owner":"1","path":["457","1827"],"pubdate":{"attribute_name":"公開日","attribute_value":"2014-06-20"},"publish_date":"2014-06-20","publish_status":"0","recid":"31052","relation_version_is_last":true,"title":["Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-15T04:01:35.510041+00:00"}