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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile

http://hdl.handle.net/10191/27474
http://hdl.handle.net/10191/27474
98e509cc-519f-4afa-9169-9cee6e8943a2
名前 / ファイル ライセンス アクション
4919_227-234.pdf 4919_227-234.pdf (622.3 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile
タイトル
言語 en
タイトル Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile
言語
言語 eng
キーワード
主題Scheme Other
主題 interferometer
キーワード
主題Scheme Other
主題 wavelength-scanning
キーワード
主題Scheme Other
主題 step-profile measurement
キーワード
主題Scheme Other
主題 feedback control
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 169467

Sasaki, Osami

Search repository
Honma, Kunihiro

× Honma, Kunihiro

WEKO 169468

Honma, Kunihiro

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 An optical path difference (OPD) and the amplitude of sinusoidal wavelength-scanning are controlled with double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. A linear CCD image sensor is used to measure one-dimensional step-profiles in real-time. Two different step profiles with a step height of 1 μm and 20 μm, respectively, are measured with the measurement error less than 8 nm. Measuring time for one measuring point is 0.04 s.
内容記述
内容記述タイプ Other
内容記述 Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. : Oct 2002, Shanghai, China
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 4919, p. 227-234, 発行日 2002-10
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.465819
権利
権利情報 Copyright 2002 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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