{"_buckets": {"deposit": "cc2bd4fc-5c6d-4299-a281-e97a8fcbe633"}, "_deposit": {"id": "31052", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "31052"}, "status": "published"}, "_oai": {"id": "oai:niigata-u.repo.nii.ac.jp:00031052"}, "item_8_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2002-10", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "234", "bibliographicPageStart": "227", "bibliographicVolumeNumber": "4919", "bibliographic_titles": [{"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering"}, {"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering", "bibliographic_titleLang": "en"}]}]}, "item_8_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "An optical path difference (OPD) and the amplitude of sinusoidal wavelength-scanning are controlled with double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. A linear CCD image sensor is used to measure one-dimensional step-profiles in real-time. Two different step profiles with a step height of 1 \u03bcm and 20 \u03bcm, respectively, are measured with the measurement error less than 8 nm. Measuring time for one measuring point is 0.04 s.", "subitem_description_type": "Abstract"}]}, "item_8_description_5": {"attribute_name": "\u5185\u5bb9\u8a18\u8ff0", "attribute_value_mlt": [{"subitem_description": "Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. : Oct 2002, Shanghai, China", "subitem_description_type": "Other"}]}, "item_8_publisher_7": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "International Society for Optical Engineering, SPIE"}]}, "item_8_relation_14": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "info:doi/10.1117/12.465819", "subitem_relation_type_select": "DOI"}}]}, "item_8_rights_15": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright 2002 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited."}]}, "item_8_select_19": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_8_source_id_11": {"attribute_name": "\u66f8\u8a8c\u30ec\u30b3\u30fc\u30c9ID", "attribute_value_mlt": [{"subitem_source_identifier": "AA10619755", "subitem_source_identifier_type": "NCID"}]}, "item_8_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0277786X", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Sasaki, Osami"}], "nameIdentifiers": [{"nameIdentifier": "169467", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Honma, Kunihiro"}], "nameIdentifiers": [{"nameIdentifier": "169468", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Suzuki, Takamasa"}], "nameIdentifiers": [{"nameIdentifier": "39", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-08-26"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "4919_227-234.pdf", "filesize": [{"value": "622.3 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 622300.0, "url": {"label": "4919_227-234.pdf", "url": "https://niigata-u.repo.nii.ac.jp/record/31052/files/4919_227-234.pdf"}, "version_id": "825a5805-fdea-429d-91f2-0f18b3a042f5"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "interferometer", "subitem_subject_scheme": "Other"}, {"subitem_subject": "wavelength-scanning", "subitem_subject_scheme": "Other"}, {"subitem_subject": "step-profile measurement", "subitem_subject_scheme": "Other"}, {"subitem_subject": "feedback control", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile"}, {"subitem_title": "Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile", "subitem_title_language": "en"}]}, "item_type_id": "8", "owner": "1", "path": ["453/457", "423/435/1827"], "permalink_uri": "http://hdl.handle.net/10191/27474", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2014-06-20"}, "publish_date": "2014-06-20", "publish_status": "0", "recid": "31052", "relation": {}, "relation_version_is_last": true, "title": ["Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile"], "weko_shared_id": null}