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Sensitivity dependence with respect to diaphragm dimensions in a glass-based integrated optic pressure sensor
http://hdl.handle.net/10191/31228
http://hdl.handle.net/10191/31228f288285d-b5ef-4dd1-90e2-70e730f15e23
名前 / ファイル | ライセンス | アクション |
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-12-24 | |||||
タイトル | ||||||
タイトル | Sensitivity dependence with respect to diaphragm dimensions in a glass-based integrated optic pressure sensor | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Sensitivity dependence with respect to diaphragm dimensions in a glass-based integrated optic pressure sensor | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Integrated optics | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | pressure sensor | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | elasto-optic effect | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | glass | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | diaphragm | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_5794 | |||||
タイプ | conference paper | |||||
著者 |
Iwase, Yoshihiko
× Iwase, Yoshihiko× Okamoto, Yumi× Ohkawa, Masashi× Sekine, Seishi× Sato, Takashi |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | In this paper, the relationship between sensitivity and diaphragm dimensions in a glass-based integrated optic pressure sensor is described. The sensor has a rectangular diaphragm as a pressure-sensitive structure and a straight sensing waveguide across the diaphragm. The sensor operation is based on the phenonemon that a phase difference between two orthogonal guilded modes is induced by the elasto-optic effect in the presence of applied pressure. The sensitivity of the sensor is theoretically known to be dependent on the thickness and side length of the diaphragm. Such dependencies are worth investigating to obtain helpful design rules for miniaturization of the sensor, but have not been examined experimentally in detail. In this study, to examine the relationship between sensitivity and thickness, two sensors were fabricated with 10 mm x 10 mm x 0.3 mm (sensor #1) and 10 mm x 10 mm x 0.22 mm (sensor #2) diaphragms. The sensitivity of sensor #2 was larger than that of sensor #1 by a factor of 1.72, which closely agreed with the theoretical factor of 1.86. Moreover, to determine the relationship between sensitivity and side length, two more sensors, besides sensor #2, with 7mm-square (sensor #3) and 14mm-square (sensor #4) diaphragms were fabricated with a diaphragm thickness of 0.22 mm. The measured sensitivities agree approximately with the theoretical ones although there was a slight difference in sensor #4. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Integrated optics: devices, materials, and technologies 7 : 27-29 January 2003 : San Jose, California, USA. : Jan 2003, San Jose, CA | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 4987, p. 256-263, 発行日 2003-07 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.474348 | |||||
権利 | ||||||
権利情報 | Copyright 2003 Society of Photo-Optical Instrumentation Engineers | |||||
著者版フラグ | ||||||
値 | publisher |