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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Sensitivity dependence with respect to diaphragm dimensions in a glass-based integrated optic pressure sensor

http://hdl.handle.net/10191/31228
http://hdl.handle.net/10191/31228
f288285d-b5ef-4dd1-90e2-70e730f15e23
名前 / ファイル ライセンス アクション
4987_256-263.pdf 4987_256-263.pdf (753.3 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-12-24
タイトル
タイトル Sensitivity dependence with respect to diaphragm dimensions in a glass-based integrated optic pressure sensor
タイトル
言語 en
タイトル Sensitivity dependence with respect to diaphragm dimensions in a glass-based integrated optic pressure sensor
言語
言語 eng
キーワード
主題Scheme Other
主題 Integrated optics
キーワード
主題Scheme Other
主題 pressure sensor
キーワード
主題Scheme Other
主題 elasto-optic effect
キーワード
主題Scheme Other
主題 glass
キーワード
主題Scheme Other
主題 diaphragm
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Iwase, Yoshihiko

× Iwase, Yoshihiko

WEKO 169459

Iwase, Yoshihiko

Search repository
Okamoto, Yumi

× Okamoto, Yumi

WEKO 169460

Okamoto, Yumi

Search repository
Ohkawa, Masashi

× Ohkawa, Masashi

WEKO 169461

Ohkawa, Masashi

Search repository
Sekine, Seishi

× Sekine, Seishi

WEKO 169462

Sekine, Seishi

Search repository
Sato, Takashi

× Sato, Takashi

WEKO 169463

Sato, Takashi

Search repository
抄録
内容記述タイプ Abstract
内容記述 In this paper, the relationship between sensitivity and diaphragm dimensions in a glass-based integrated optic pressure sensor is described. The sensor has a rectangular diaphragm as a pressure-sensitive structure and a straight sensing waveguide across the diaphragm. The sensor operation is based on the phenonemon that a phase difference between two orthogonal guilded modes is induced by the elasto-optic effect in the presence of applied pressure. The sensitivity of the sensor is theoretically known to be dependent on the thickness and side length of the diaphragm. Such dependencies are worth investigating to obtain helpful design rules for miniaturization of the sensor, but have not been examined experimentally in detail. In this study, to examine the relationship between sensitivity and thickness, two sensors were fabricated with 10 mm x 10 mm x 0.3 mm (sensor #1) and 10 mm x 10 mm x 0.22 mm (sensor #2) diaphragms. The sensitivity of sensor #2 was larger than that of sensor #1 by a factor of 1.72, which closely agreed with the theoretical factor of 1.86. Moreover, to determine the relationship between sensitivity and side length, two more sensors, besides sensor #2, with 7mm-square (sensor #3) and 14mm-square (sensor #4) diaphragms were fabricated with a diaphragm thickness of 0.22 mm. The measured sensitivities agree approximately with the theoretical ones although there was a slight difference in sensor #4.
内容記述
内容記述タイプ Other
内容記述 Integrated optics: devices, materials, and technologies 7 : 27-29 January 2003 : San Jose, California, USA. : Jan 2003, San Jose, CA
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 4987, p. 256-263, 発行日 2003-07
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.474348
権利
権利情報 Copyright 2003 Society of Photo-Optical Instrumentation Engineers
著者版フラグ
値 publisher
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