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{"_buckets": {"deposit": "212a9dd3-c1d7-43db-912a-ad6fa128fffb"}, "_deposit": {"id": "31048", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "31048"}, "status": "published"}, "_oai": {"id": "oai:niigata-u.repo.nii.ac.jp:00031048"}, "item_8_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2004-02", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "133", "bibliographicPageStart": "127", "bibliographicVolumeNumber": "5265", "bibliographic_titles": [{"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering"}, {"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering", "bibliographic_titleLang": "en"}]}]}, "item_8_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "We propose a two-wavelength interferometer that is used to a stroboscopic step height measurement. Different from most two-wavelength interferometers, in present experiment, two slightly different wavelengths are simultaneously oscillated by currently and thermally controlling a laser diode to work at mode hop region. By use of this two-wavelength laser source, a Twyman-Green interferometer, whose reference arm and object arm have known step height r and unknown step height h, respectively, is constructed. Three independent interference patterns corresponding to different OPDs are formed and they can be simultaneously taken by a CCD camera. Furthermore, tilting the reference, spatial frequencies are introduced into the interference patterns. Taking the Fourier transform of these patterns, three fringe amplitudes are obtained and their expressions can be solved for the unknown step height. As we can capture clear image of the interference patterns in a very short time by use of the high speed shutter function of the CCD camera, the error induced by the external disturbance is farthest reduced.", "subitem_description_type": "Abstract"}]}, "item_8_description_5": {"attribute_name": "\u5185\u5bb9\u8a18\u8ff0", "attribute_value_mlt": [{"subitem_description": "Two- and three-dimensional vision systems for inspection, control, and metrology : 29-30 October 2003 : Providence, Rhode Island, USA. : Oct 2003, Providence, RI", "subitem_description_type": "Other"}]}, "item_8_publisher_7": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "International Society for Optical Engineering, SPIE"}]}, "item_8_relation_14": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "info:doi/10.1117/12.518642", "subitem_relation_type_select": "DOI"}}]}, "item_8_rights_15": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright 2004 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited."}]}, "item_8_select_19": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_8_source_id_11": {"attribute_name": "\u66f8\u8a8c\u30ec\u30b3\u30fc\u30c9ID", "attribute_value_mlt": [{"subitem_source_identifier": "AA10619755", "subitem_source_identifier_type": "NCID"}]}, "item_8_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0277786X", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Zhao, Xuefeng"}], "nameIdentifiers": [{"nameIdentifier": "169451", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Suzuki, Takamasa"}], "nameIdentifiers": [{"nameIdentifier": "39", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sasaki, Osami"}], "nameIdentifiers": [{"nameIdentifier": "169453", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-08-26"}], "displaytype": "detail", "download_preview_message": "", "filename": "5265_127-133.pdf", "filesize": [{"value": "403.3 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 4033000, "url": {"label": "5265_127-133.pdf", "url": "https://niigata-u.repo.nii.ac.jp/record/31048/files/5265_127-133.pdf"}, "version_id": "aa4792aa-3fb4-4596-b8fd-61f294fd132c"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "interferometry", "subitem_subject_scheme": "Other"}, {"subitem_subject": "optical metrology", "subitem_subject_scheme": "Other"}, {"subitem_subject": "laser diode", "subitem_subject_scheme": "Other"}, {"subitem_subject": "height measurement", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "Stroboscopic step height measurement with two-wavelength interferometer using single diode laser source", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Stroboscopic step height measurement with two-wavelength interferometer using single diode laser source"}, {"subitem_title": "Stroboscopic step height measurement with two-wavelength interferometer using single diode laser source", "subitem_title_language": "en"}]}, "item_type_id": "8", "owner": "1", "path": ["453/457", "423/435/1827"], "permalink_uri": "http://hdl.handle.net/10191/27485", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_name_i18n": "\u516c\u958b\u65e5", "attribute_value": "2014-06-20"}, "publish_date": "2014-06-20", "publish_status": "0", "recid": "31048", "relation": {}, "relation_version_is_last": true, "title": ["Stroboscopic step height measurement with two-wavelength interferometer using single diode laser source"], "weko_shared_id": null}
  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Stroboscopic step height measurement with two-wavelength interferometer using single diode laser source

http://hdl.handle.net/10191/27485
a47f0ada-63da-4290-ab88-e7f3237ba166
プレビュー
名前 / ファイル ライセンス Actions
5265_127-133.pdf 5265_127-133.pdf (403.3 kB)
item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Stroboscopic step height measurement with two-wavelength interferometer using single diode laser source
タイトル
言語 en
タイトル Stroboscopic step height measurement with two-wavelength interferometer using single diode laser source
言語
言語 eng
キーワード
主題Scheme Other
主題 interferometry
キーワード
主題Scheme Other
主題 optical metrology
キーワード
主題Scheme Other
主題 laser diode
キーワード
主題Scheme Other
主題 height measurement
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Zhao, Xuefeng

× Zhao, Xuefeng

WEKO 169451

Zhao, Xuefeng

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
Sasaki, Osami

× Sasaki, Osami

WEKO 169453

Sasaki, Osami

Search repository
抄録
内容記述タイプ Abstract
内容記述 We propose a two-wavelength interferometer that is used to a stroboscopic step height measurement. Different from most two-wavelength interferometers, in present experiment, two slightly different wavelengths are simultaneously oscillated by currently and thermally controlling a laser diode to work at mode hop region. By use of this two-wavelength laser source, a Twyman-Green interferometer, whose reference arm and object arm have known step height r and unknown step height h, respectively, is constructed. Three independent interference patterns corresponding to different OPDs are formed and they can be simultaneously taken by a CCD camera. Furthermore, tilting the reference, spatial frequencies are introduced into the interference patterns. Taking the Fourier transform of these patterns, three fringe amplitudes are obtained and their expressions can be solved for the unknown step height. As we can capture clear image of the interference patterns in a very short time by use of the high speed shutter function of the CCD camera, the error induced by the external disturbance is farthest reduced.
内容記述
内容記述タイプ Other
内容記述 Two- and three-dimensional vision systems for inspection, control, and metrology : 29-30 October 2003 : Providence, Rhode Island, USA. : Oct 2003, Providence, RI
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 5265, p. 127-133, 発行日 2004-02
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
関連識別子
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.518642
権利
権利情報 Copyright 2004 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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