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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Guided-Wave Optical Pressure Sensor Responding only to Changing Pressure

http://hdl.handle.net/10191/31206
http://hdl.handle.net/10191/31206
3dfb50cc-c92c-4215-8fd8-a0833434062d
名前 / ファイル ライセンス アクション
5728_309-316.pdf 5728_309-316.pdf (938.7 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-12-24
タイトル
タイトル Guided-Wave Optical Pressure Sensor Responding only to Changing Pressure
タイトル
言語 en
タイトル Guided-Wave Optical Pressure Sensor Responding only to Changing Pressure
言語
言語 eng
キーワード
主題Scheme Other
主題 Integrated optics
キーワード
主題Scheme Other
主題 guided-wave optics
キーワード
主題Scheme Other
主題 pressure sensor
キーワード
主題Scheme Other
主題 diaphragm
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Endo, Yoshisumi

× Endo, Yoshisumi

WEKO 169444

Endo, Yoshisumi

Search repository
Ohkawa, Masashi

× Ohkawa, Masashi

WEKO 169445

Ohkawa, Masashi

Search repository
Sekine, Seishi

× Sekine, Seishi

WEKO 169446

Sekine, Seishi

Search repository
Sato, Takashi

× Sato, Takashi

WEKO 169447

Sato, Takashi

Search repository
抄録
内容記述タイプ Abstract
内容記述 In this paper, an original guided-wave optical pressure sensor that responds only to rapid pressure change is described. The proposed sensor is based on a conventional guided-wave optical pressure sensor using intermodal interference, with an added semi-closed space with a small hole under the bottom side of the diaphragm. By the addition of this semi-closed space, the sensor, unlike conventional sensors, can withstand high static pressure. When there is a sudden change in ambient pressure, pressure within the semi-closed space cannot quickly adjust due to the small hole that restricts fluid flow. So, pressure difference is induced on the diaphragm for a short while. Thus, the sensor shows a response only to changes in pressure, not to static pressure. We examined the step response of the sensor, that is, the output characteristics for sudden pressure change. The diaphragm dimensions of the fabricated sensor were 14 mmX14 mmX0.22 mm. Also, the volume of the semi-closed space was 14 mmX14 mmX1.8 mm, and the sectional area of the small hole was 93 umX25 um. In this experiment, the pressure in a 30 cmX28 cmX30 cm closed box, in which the fabricated sensor was placed, was suddenly increased by 0.78 kPa. Due to the pressure change, the output intensity decreased by approximately 20 % of the initial intensity level. Approximately 1.4 sec after the step-like change in pressure, output intensity returned to the initial level.
内容記述
内容記述タイプ Other
内容記述 Integrated optics: devices, materials, and technologies 9 : 24-26 January 2005 : San Jose, California, USA. : Jan 2005, San Jose, CA
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 5728, p. 309-316, 発行日 2005-04
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.588457
権利
権利情報 Copyright 2005 Society of Photo-Optical Instrumentation Engineers
著者版フラグ
値 publisher
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