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Guided-Wave Optical Pressure Sensor Responding only to Changing Pressure
http://hdl.handle.net/10191/31206
http://hdl.handle.net/10191/312063dfb50cc-c92c-4215-8fd8-a0833434062d
名前 / ファイル | ライセンス | アクション |
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5728_309-316.pdf (938.7 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-12-24 | |||||
タイトル | ||||||
タイトル | Guided-Wave Optical Pressure Sensor Responding only to Changing Pressure | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Guided-Wave Optical Pressure Sensor Responding only to Changing Pressure | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Integrated optics | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | guided-wave optics | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | pressure sensor | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | diaphragm | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_5794 | |||||
タイプ | conference paper | |||||
著者 |
Endo, Yoshisumi
× Endo, Yoshisumi× Ohkawa, Masashi× Sekine, Seishi× Sato, Takashi |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | In this paper, an original guided-wave optical pressure sensor that responds only to rapid pressure change is described. The proposed sensor is based on a conventional guided-wave optical pressure sensor using intermodal interference, with an added semi-closed space with a small hole under the bottom side of the diaphragm. By the addition of this semi-closed space, the sensor, unlike conventional sensors, can withstand high static pressure. When there is a sudden change in ambient pressure, pressure within the semi-closed space cannot quickly adjust due to the small hole that restricts fluid flow. So, pressure difference is induced on the diaphragm for a short while. Thus, the sensor shows a response only to changes in pressure, not to static pressure. We examined the step response of the sensor, that is, the output characteristics for sudden pressure change. The diaphragm dimensions of the fabricated sensor were 14 mmX14 mmX0.22 mm. Also, the volume of the semi-closed space was 14 mmX14 mmX1.8 mm, and the sectional area of the small hole was 93 umX25 um. In this experiment, the pressure in a 30 cmX28 cmX30 cm closed box, in which the fabricated sensor was placed, was suddenly increased by 0.78 kPa. Due to the pressure change, the output intensity decreased by approximately 20 % of the initial intensity level. Approximately 1.4 sec after the step-like change in pressure, output intensity returned to the initial level. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Integrated optics: devices, materials, and technologies 9 : 24-26 January 2005 : San Jose, California, USA. : Jan 2005, San Jose, CA | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 5728, p. 309-316, 発行日 2005-04 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.588457 | |||||
権利 | ||||||
権利情報 | Copyright 2005 Society of Photo-Optical Instrumentation Engineers | |||||
著者版フラグ | ||||||
値 | publisher |