@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031044, author = {Li, Jinhuan and Sasaki, Osami and Suzuki, Takamasa}, book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering}, month = {Aug}, note = {A method for measuring diameters of metal cylinders is proposed. In this method a sinusoidally vibrating interference pattern (SVIP) of 100μm-period is used to generate an exact spatial scale along x-axis. Detection of the amplitude and the phase of the SVIP are carried out easily and exactly with sinusoidal phase-modulating interferometry. First, phase values of the SVIP on the pixels of the CCD image sensor are measured as the exact scale along the x-axis. Next, an image of the end-points of the cylinder surface is formed by extracting lights from the end-points of the cylinder. The phase of the SVIP on the end-point of the cylinder appears at a position where the amplitude of the image has maximum value along the x-axis. The x-coordinate of the end-point of the metal cylinder is calculated from the phase value of the end-point and the exact scale. The diameter is obtained from the x-coordinates of the two end-points. Metal cylinders of 9mm and 8mm-diameters are measured with an error of about ±2μm., ICO20: optical devices and instruments : 21-26 August 2005 : Changchun, China. : Aug 2005, Changchun, China}, pages = {60240Q-1--60240Q-6}, publisher = {International Society for Optical Engineering, SPIE}, title = {Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern}, volume = {6024}, year = {2005} }