@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031036, author = {Suzuki, Takamasa and Shirai, Masato and Sasaki, Osami}, book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering}, month = {Nov}, note = {A phase-shifting Sagnac interferometer that uses wavelength tunability of the laser diode is proposed. A Sagnac interferometer itself is robust for the mechanical disturbances because it has a common path configuration and requires no special reference. Unbalanced optical path introduced between p- and s-polarized beams enables us to implement easy phase-shift by the direct current modulation. Several experimental results indicate that the proposed system is useful for the disturbance-free precise measurement., Advanced materials and devices for sensing and imaging 3 : 12-14 November 2007 : Beijing, China.}, pages = {68290A-1--68290A-8}, publisher = {International Society for Optical Engineering, SPIE}, title = {Phase-shifting laser diode Sagnac interferometer for surface profile measurement}, volume = {6829}, year = {2007} }