{"created":"2021-03-01T06:37:09.458667+00:00","id":31028,"links":{},"metadata":{"_buckets":{"deposit":"fc9240c1-ba02-462f-8683-b376823645f3"},"_deposit":{"id":"31028","owners":[],"pid":{"revision_id":0,"type":"depid","value":"31028"},"status":"published"},"_oai":{"id":"oai:niigata-u.repo.nii.ac.jp:00031028","sets":["423:435:1827","453:457"]},"item_8_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2011-11","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"82010J-7","bibliographicPageStart":"82010J-1","bibliographicVolumeNumber":"8201","bibliographic_titles":[{"bibliographic_title":"Proceedings of SPIE - the International Society for Optical Engineering"},{"bibliographic_title":"Proceedings of SPIE - the International Society for Optical Engineering","bibliographic_titleLang":"en"}]}]},"item_8_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"It is difficult in interferometric metrology to maintain high spatial resolution over a large field of view. In this paper this characteristic is achieved by scanning two focused laser beams over an object surface and a reference mirror surface, respectively, with a rotating mirror, a lens, and a polarization beam splitter. An electric-optic phase modulator generates the phase difference of a sinusoidal waveform of 10 MHz between the two focused beams. Sinusoidal phase-modulating interferometry is used to calculate the phase of the interference signal caused by the two focused beams. The scanning speed of the beams is 20 m/s, and the sampling interval of the interference signal is 1/80 microseconds. The spatial resolution is 2.0 microns over the measurement region of 18.8mm. The measurement results show that the measurement error is less than 5nm.","subitem_description_type":"Abstract"}]},"item_8_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Optoelectronic measurement technology and systems : 6-9 November 2011 : Beijing, China","subitem_description_type":"Other"}]},"item_8_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"International Society for Optical Engineering, SPIE"}]},"item_8_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"info:doi/10.1117/12.910102","subitem_relation_type_select":"DOI"}}]},"item_8_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright(C)2011 Society of Photo-Optical Instrumentation Engineers"}]},"item_8_select_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_8_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA10619755","subitem_source_identifier_type":"NCID"}]},"item_8_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0277786X","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Sasaki, Osami"}],"nameIdentifiers":[{"nameIdentifier":"169379","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Saito, Tsuyoshi"}],"nameIdentifiers":[{"nameIdentifier":"169380","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Choi, Samuel"}],"nameIdentifiers":[{"nameIdentifier":"169381","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Suzuki, Takamasa"}],"nameIdentifiers":[{"nameIdentifier":"39","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-08-26"}],"displaytype":"detail","filename":"8201_82010J.pdf","filesize":[{"value":"3.3 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"8201_82010J.pdf","url":"https://niigata-u.repo.nii.ac.jp/record/31028/files/8201_82010J.pdf"},"version_id":"42002d27-d0d4-4de0-89ce-1acb46cea53a"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"beam scanning","subitem_subject_scheme":"Other"},{"subitem_subject":"interferometer","subitem_subject_scheme":"Other"},{"subitem_subject":"sinusoidal phase-modulation","subitem_subject_scheme":"Other"},{"subitem_subject":"polarization interferometry","subitem_subject_scheme":"Other"},{"subitem_subject":"surface profile measurement","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Beam scanning laser interferometer with high spatial resolution over a large field of view","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Beam scanning laser interferometer with high spatial resolution over a large field of view"},{"subitem_title":"Beam scanning laser interferometer with high spatial resolution over a large field of view","subitem_title_language":"en"}]},"item_type_id":"8","owner":"1","path":["457","1827"],"pubdate":{"attribute_name":"公開日","attribute_value":"2014-12-18"},"publish_date":"2014-12-18","publish_status":"0","recid":"31028","relation_version_is_last":true,"title":["Beam scanning laser interferometer with high spatial resolution over a large field of view"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-15T04:01:33.646758+00:00"}