@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031028,
 author = {Sasaki, Osami and Saito, Tsuyoshi and Choi, Samuel and Suzuki, Takamasa},
 book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering},
 month = {Nov},
 note = {It is difficult in interferometric metrology to maintain high spatial resolution over a large field of view. In this paper this characteristic is achieved by scanning two focused laser beams over an object surface and a reference mirror surface, respectively, with a rotating mirror, a lens, and a polarization beam splitter. An electric-optic phase modulator generates the phase difference of a sinusoidal waveform of 10 MHz between the two focused beams. Sinusoidal phase-modulating interferometry is used to calculate the phase of the interference signal caused by the two focused beams. The scanning speed of the beams is 20 m/s, and the sampling interval of the interference signal is 1/80 microseconds. The spatial resolution is 2.0 microns over the measurement region of 18.8mm. The measurement results show that the measurement error is less than 5nm., Optoelectronic measurement technology and systems : 6-9 November 2011 : Beijing, China},
 pages = {82010J-1--82010J-7},
 publisher = {International Society for Optical Engineering, SPIE},
 title = {Beam scanning laser interferometer with high spatial resolution over a large field of view},
 volume = {8201},
 year = {2011}
}