@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031018, author = {Choi, Samuel and Kato, Heiichi and Sasaki, Osami and Suzuki, Takamasa}, book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering}, month = {Nov}, note = {We investigated the interference amplitude and phase characteristics of a multi-frequency sweeping interferometer with sinusoidal phase modulating technique. A novel multi frequency sweeping light source that generated an interval and center frequency variable frequency comb with a bandwidth of 14 nm was demonstrated. The interference phase and amplitude distributions were investigated by observing the zeroth and first order interference signals. In addition, the zeroth and first order interference phase variations caused by center frequency sweeping were measured., Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China}, pages = {856302-1--856302-7}, publisher = {International Society for Optical Engineering, SPIE}, title = {Multi-frequency sweeping interferometry using spatial optical frequency modulation}, volume = {8563}, year = {2012} }