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Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance
http://hdl.handle.net/10191/27591
http://hdl.handle.net/10191/27591784057f9-6cf3-4217-bb30-ca9b3a657e3b
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | laser diodes | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometry | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | feedback control | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | displacement metrology | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | surface metrology | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | surface profiles | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Takahashi, Kazuhide× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We propose a sinusoidal phase modulating laser diode interferometer that is insensitive to vibrations of the optical components and fluctuations in the optical wavelength of the laser diode. These external disturbances cause fluctuations in the phase of the interference signal. After we analyze the sinusoidal phase modulation in a laser diode interferometer, we describe the method of the feedback control of the injection current of the laser diode to eliminate the phase fluctuations of the interference signal We construct two sinusoidal phase modulating interferometers for movement measurements and surface profile measurements, respectively. The experimental results make it clear that the interferometers work well in mechanically noisy circumstances. | |||||
書誌情報 |
Optical Engineering en : Optical Engineering 巻 29, 号 12, p. 1511-1515, 発行日 1990-12 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00913286 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00333891 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.55754 | |||||
権利 | ||||||
権利情報 | Copyright 1990 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
著者版フラグ | ||||||
値 | publisher |