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  1. 060 工学部
  2. 10 学術雑誌論文
  3. 10 査読済論文
  1. 0 資料タイプ別
  2. 01 学術雑誌論文

Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm

http://hdl.handle.net/10191/31054
518575de-c813-4b0e-a2c3-568da67e916f
名前 / ファイル ライセンス アクション
51_1_014401.pdf 51_1_014401.pdf (1.0 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2014-12-12
タイトル
タイトル Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm
タイトル
言語 en
タイトル Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm
言語
言語 eng
キーワード
主題Scheme Other
主題 integrated optics
キーワード
主題Scheme Other
主題 pressure sensor
キーワード
主題Scheme Other
主題 diaphragm
キーワード
主題Scheme Other
主題 MOEMS
キーワード
主題Scheme Other
主題 elasto-optic effect
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Ohkawa, Masashi

× Ohkawa, Masashi

WEKO 7437

Ohkawa, Masashi

Search repository
Sato, Takashi

× Sato, Takashi

WEKO 7438

Sato, Takashi

Search repository
抄録
内容記述タイプ Abstract
内容記述 In this study, an original scale-reduction rule without a drop in the sensitivity of a guided-wave optical pressure sensor was obtained using a micromachined diaphragm. The sensor has a rectangular diaphragm as a pressure-sensitive structure and a sensing waveguide across the diaphragm. Its sensitivity is theoretically known to be strongly dependent on the dimensions of the diaphragm. According to the theoretical results, the sensitivity can be kept constant even if the diaphragm dimensions are reduced as long as both the aspect ratio and the characteristic length of the diaphragm remain constant. Here, the characteristic length is introduced as the cube of either width or length of the rectangular diaphragm divided by the square of its thickness. Such a scale-reduction rule would be very useful for miniaturizing a sensor without reducing sensitivity, although it has not been experimentally confirmed. In this study, the scale-reduction rule was experimentally examined using three fabricated sensors with the same aspect ratio and the same characteristic length. The measured sensitivities of the three sensors were quite similar to each other, as theoretically predicted.
書誌情報 Optical Engineering
en : Optical Engineering

巻 51, 号 1, p. 014401-1-014401-6, 発行日 2012-01
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 00913286
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00333891
DOI
関連識別子
識別子タイプ DOI
関連識別子 info:doi/10.1117/1.OE.51.1.014401
権利
権利情報 Copyright 2012 Society of Photo-Optical Instrumentation Engineers
著者版フラグ
値 publisher
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