{"_buckets": {"deposit": "27b76265-ddcc-4b20-a0e9-17e7f1012b81"}, "_deposit": {"id": "2197", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "2197"}, "status": "published"}, "_oai": {"id": "oai:niigata-u.repo.nii.ac.jp:00002197", "sets": ["454", "425"]}, "item_5_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2012-01", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "1", "bibliographicPageEnd": "014401-6", "bibliographicPageStart": "014401-1", "bibliographicVolumeNumber": "51", "bibliographic_titles": [{"bibliographic_title": "Optical Engineering"}, {"bibliographic_title": "Optical Engineering", "bibliographic_titleLang": "en"}]}]}, "item_5_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "In this study, an original scale-reduction rule without a drop in the sensitivity of a guided-wave optical pressure sensor was obtained using a micromachined diaphragm. The sensor has a rectangular diaphragm as a pressure-sensitive structure and a sensing waveguide across the diaphragm. Its sensitivity is theoretically known to be strongly dependent on the dimensions of the diaphragm. According to the theoretical results, the sensitivity can be kept constant even if the diaphragm dimensions are reduced as long as both the aspect ratio and the characteristic length of the diaphragm remain constant. Here, the characteristic length is introduced as the cube of either width or length of the rectangular diaphragm divided by the square of its thickness. Such a scale-reduction rule would be very useful for miniaturizing a sensor without reducing sensitivity, although it has not been experimentally confirmed. In this study, the scale-reduction rule was experimentally examined using three fabricated sensors with the same aspect ratio and the same characteristic length. The measured sensitivities of the three sensors were quite similar to each other, as theoretically predicted.", "subitem_description_type": "Abstract"}]}, "item_5_publisher_7": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "International Society for Optical Engineering, SPIE"}]}, "item_5_relation_14": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "info:doi/10.1117/1.OE.51.1.014401", "subitem_relation_type_select": "DOI"}}]}, "item_5_rights_15": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright 2012 Society of Photo-Optical Instrumentation Engineers"}]}, "item_5_select_19": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_5_source_id_11": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AA00333891", "subitem_source_identifier_type": "NCID"}]}, "item_5_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "00913286", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Ohkawa, Masashi"}], "nameIdentifiers": [{"nameIdentifier": "7437", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sato, Takashi"}], "nameIdentifiers": [{"nameIdentifier": "7438", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-07-29"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "51_1_014401.pdf", "filesize": [{"value": "1.0 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 1000000.0, "url": {"label": "51_1_014401.pdf", "url": "https://niigata-u.repo.nii.ac.jp/record/2197/files/51_1_014401.pdf"}, "version_id": "ff86c4f1-d8c3-4ceb-a387-9f8e0a51514b"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "integrated optics", "subitem_subject_scheme": "Other"}, {"subitem_subject": "pressure sensor", "subitem_subject_scheme": "Other"}, {"subitem_subject": "diaphragm", "subitem_subject_scheme": "Other"}, {"subitem_subject": "MOEMS", "subitem_subject_scheme": "Other"}, {"subitem_subject": "elasto-optic effect", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm"}, {"subitem_title": "Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm", "subitem_title_language": "en"}]}, "item_type_id": "5", "owner": "1", "path": ["454", "425"], "permalink_uri": "http://hdl.handle.net/10191/31054", "pubdate": {"attribute_name": "公開日", "attribute_value": "2014-12-12"}, "publish_date": "2014-12-12", "publish_status": "0", "recid": "2197", "relation": {}, "relation_version_is_last": true, "title": ["Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm"], "weko_shared_id": null}