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Analysis of Stress Gradient in Ceramic Film by X-ray Method
http://hdl.handle.net/10191/18178
http://hdl.handle.net/10191/18178d7321975-1604-4ca0-b659-741713638921
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2012-06-04 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Analysis of Stress Gradient in Ceramic Film by X-ray Method | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Residual Stress | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Experimental Stress Analysis | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Ceramics | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | X-ray Stress Measurement | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Thin Film | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Coating Film | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Suzuki, Kenji
× Suzuki, Kenji× Tanaka, Keisuke× Sakaida, Yoshihisa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The sin' Ψ diagram taken from a specimen with steep stress gradients beneath the surface shows nonlinearity, because the X-ray penetration depth changes depending on the tilt angle. Stress gradients can be determined from this nonlinearity. Since ceramic materials have deep X-ray penetration depth, the thickness of a ceramic thin film should have a significant effect on the nonlinearity of the sin^2Ψ method, In this paper, we propose a method of X-ray measurement of the stress gradient, which takes into account film thickness under the assumption of linear stress distributions. A 58-μm-thick silicon nitride film was prepared. The film specimen was polished carefully with diamond slurry to obtain sharp profiles of the X-ray diffraction. To obtain a steep stress gradient, the specimen was bent on a cylinder. The stress distribution estimated by the present method agreed well with the applied bending stress. In conclusion, the stress gradient should be analyzed by the weighted average stress on the basis of the intensity of the diffracted X-rays from the entire thin film, when the thickness is six times larger than the effective X-ray penetration depth. | |||||
言語 | en | |||||
書誌情報 |
en : JSME International Journal. Series A, Solid mechanics and material engineering. 巻 41, 号 3, p. 416-421, 発行日 1998 |
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出版者 | ||||||
言語 | en | |||||
出版者 | Japan Society of Mechanical Engineers | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1344-7912 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11179396 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://doi.org/10.1299/jsmea.41.416 | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
著者版フラグ | ||||||
値 | publisher |