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  1. 260 大学院医歯学総合研究科(歯)
  2. 10 学術雑誌論文
  3. 10 査読済論文
  1. 0 資料タイプ別
  2. 01 学術雑誌論文

Chemical mechanical polishing of titanium with colloidal silica containing hydrogen peroxide : mirror polishing and surface properties

http://hdl.handle.net/10191/18167
http://hdl.handle.net/10191/18167
7516d8a2-7fbb-48f4-ad92-e43d5b94e889
名前 / ファイル ライセンス アクション
28_1_68-74.pdf 28_1_68-74.pdf (1.2 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2012-06-04
タイトル
言語 en
タイトル Chemical mechanical polishing of titanium with colloidal silica containing hydrogen peroxide : mirror polishing and surface properties
言語
言語 eng
キーワード
主題Scheme Other
主題 Chemical mechanical polishing
キーワード
主題Scheme Other
主題 Titanium
キーワード
主題Scheme Other
主題 XPS
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Okawa, Seigo

× Okawa, Seigo

WEKO 4667

en Okawa, Seigo

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Watanabe, Kouichi

× Watanabe, Kouichi

WEKO 4668

en Watanabe, Kouichi

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抄録
内容記述タイプ Abstract
内容記述 Chemical mechanical polishing (CMP) of cpTi (Ti) was carried out using two types of slurries, acidic and basic colloidal silica containing H_2O_2 up to 3wt%, to obtain flat and mirror-polished surfaces without any contaminated and reacted layers. Polishing behavior and surface properties were investigated using AFM, EPMA, and XPS. Weight loss of Ti polished by CMP using the basic slurry was larger than that using the acidic one, and surface roughness was less than 2nm RMS when basic slurry containing 3 wt% H_2O_2 was used. Moreover, three kinds of chemical species, OH^-, O^<2->, and H_2O, were detected on the Ti surfaces polished by CMP using these slurries. Results of this study showed that CMP using colloidal silica containing H_2O_2 successfully created a mirror-polished surface without contaminated and reacted layers.
言語 en
書誌情報 en : Dental Materials Journal

巻 28, 号 1, p. 68-74, 発行日 2009-01
出版者
言語 ja
出版者 日本歯科理工学会
ISSN
収録物識別子タイプ ISSN
収録物識別子 0287-4547
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10443149
DOI
識別子タイプ DOI
関連識別子 http://doi.org/10.4012/dmj.28.68
権利
権利情報 日本歯科理工学会
権利
権利情報 本文データは学協会の許諾に基づきCiNiiから複製したものである
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
著者版フラグ
値 publisher
異版である
関連タイプ isVersionOf
識別子タイプ URI
関連識別子 http://ci.nii.ac.jp/naid/110007041976
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