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  1. 060 工学部
  2. 10 学術雑誌論文
  3. 10 査読済論文
  1. 0 資料タイプ別
  2. 01 学術雑誌論文

Double sinusoidal phase-modulating laser diode interferometer for distance measurement

http://hdl.handle.net/10191/27517
http://hdl.handle.net/10191/27517
17348413-3dbe-4bf2-a9f3-ff5e99af4656
名前 / ファイル ライセンス アクション
30_25_3617-3621.pdf 30_25_3617-3621.pdf (544.9 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2014-06-20
タイトル
タイトル Double sinusoidal phase-modulating laser diode interferometer for distance measurement
タイトル
言語 en
タイトル Double sinusoidal phase-modulating laser diode interferometer for distance measurement
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 4214

Sasaki, Osami

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Yoshida, Tadahiko

× Yoshida, Tadahiko

WEKO 4215

Yoshida, Tadahiko

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Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 Sinusoidal phase-modulating interferometry is used to detect exactly the sinusoidal phase variation of an interference signal even when the amplitude of the interference signal is varied by modulation of the injection current. We can easily provide a sinusoidal phase-modulating interferometer with a feedback control system that eliminates the phase fluctuations caused by mechanical vibrations. The methods using sinusoidal phase-modulating interferometry improve the resolution of distance measurements. Experimental results show that the thickness of gauge blocks is measured with a resolution of ~ 0.5 μm.
書誌情報 Applied Optics
en : Applied Optics

巻 30, 号 25, p. 3617-3621, 発行日 1991-09
出版者
出版者 Optical Society of America
ISSN
収録物識別子タイプ ISSN
収録物識別子 00036935
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00543409
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1364/AO.30.003617
権利
権利情報 © 1991 Optical Society of America
権利
権利情報 This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.30.003617. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
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