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  1. 060 工学部
  2. 10 学術雑誌論文
  3. 10 査読済論文
  1. 0 資料タイプ別
  2. 01 学術雑誌論文

Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement

http://hdl.handle.net/10191/27524
http://hdl.handle.net/10191/27524
7fce6fe7-a75e-4822-a795-8e225d761ac2
名前 / ファイル ライセンス アクション
39_25_4589-4592.pdf 39_25_4589-4592.pdf (461.1 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2014-06-20
タイトル
タイトル Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement
タイトル
言語 en
タイトル Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 4170

Sasaki, Osami

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Murata, Norihiko

× Murata, Norihiko

WEKO 4171

Murata, Norihiko

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Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

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抄録
内容記述タイプ Abstract
内容記述 In sinusoidal phase-modulating interferometry an optical path length (OPD) larger than a wavelength is measured by detection of sinusoidal phase-modulation amplitude Z(b) of the interference signal that is produced by sinusoidal scanning of the wavelength of a light source. A light source with a large scanning width of wavelength is created by use of a superluminescent laser diode for the error in the measured value obtained by Z(b) to be smaller than half of the central wavelength. In this situation the measured value can be combined with a fractional value of the OPD obtained from the conventional phase of the interference signal. A sinusoidal wavelength-scanning interferometer with the light source measures an OPD over a few tens of micrometers with a high accuracy of a few nanometers.
書誌情報 Applied Optics
en : Applied Optics

巻 39, 号 25, p. 4589-4592, 発行日 2000-09
出版者
出版者 Optical Society of America
ISSN
収録物識別子タイプ ISSN
収録物識別子 00036935
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00543409
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1364/AO.39.004589
権利
権利情報 © 2000 Optical Society of America
権利
権利情報 This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.39.004589. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
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