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Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement
http://hdl.handle.net/10191/27524
http://hdl.handle.net/10191/275247fce6fe7-a75e-4822-a795-8e225d761ac2
名前 / ファイル | ライセンス | アクション |
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39_25_4589-4592.pdf (461.1 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Murata, Norihiko× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | In sinusoidal phase-modulating interferometry an optical path length (OPD) larger than a wavelength is measured by detection of sinusoidal phase-modulation amplitude Z(b) of the interference signal that is produced by sinusoidal scanning of the wavelength of a light source. A light source with a large scanning width of wavelength is created by use of a superluminescent laser diode for the error in the measured value obtained by Z(b) to be smaller than half of the central wavelength. In this situation the measured value can be combined with a fractional value of the OPD obtained from the conventional phase of the interference signal. A sinusoidal wavelength-scanning interferometer with the light source measures an OPD over a few tens of micrometers with a high accuracy of a few nanometers. | |||||
書誌情報 |
Applied Optics en : Applied Optics 巻 39, 号 25, p. 4589-4592, 発行日 2000-09 |
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出版者 | ||||||
出版者 | Optical Society of America | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00036935 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543409 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1364/AO.39.004589 | |||||
権利 | ||||||
権利情報 | © 2000 Optical Society of America | |||||
権利 | ||||||
権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.39.004589. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
著者版フラグ | ||||||
値 | publisher |