@article{oai:niigata-u.repo.nii.ac.jp:00001518,
 author = {Suzuki, Takamasa and Takahashi, Tsutomu and Sasaki, Osami},
 issue = {29},
 journal = {Applied Optics, Applied Optics},
 month = {Oct},
 note = {A feedback-control-equipped phase-shifting laser diode interferometer that eliminates external disturbance is proposed. The feedback loop is stabilized by adaptive control of the polarity of the interference signal. Conventional phase-shifting interferometry can be used with the feedback control, resulting in simplified signal processing and accurate measurement. Several experiments confirm the stability of the feedback control with a measurement repeatability of 1.8 nm.},
 pages = {5561--5566},
 title = {Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control},
 volume = {48},
 year = {2009}
}