2024-03-29T15:27:28Z
https://niigata-u.repo.nii.ac.jp/oai
oai:niigata-u.repo.nii.ac.jp:00003735
2022-12-15T03:36:50Z
423:424:425
453:454
Measurement of Small Pressure Difference
微小差圧の測定
微小差圧の測定
長谷川, 富市
45028
松川, 和正
45029
Flow Measurements
Sensor
Laser
Differential Pressure
Calibration
A pressure gauge of the diaphragm type of high sensitivity has been developed to measure small differential pressures. Low and high pressures are each led to chambers which are separated with a membrane; the differential pressure between the two chambers give a displacement to the membrane, and the displacement is detected by a small laser displacement sensor through a glass window in the chamber wall. Tested membranes are permanently deformed in advance to a wavy form in order to give high sensitivity or are otherwise used in the flat condition. Easy exchange of the kinds of membranes makes it possible to widen the range of differential pressures measured. Calibration is made by means of a simple method using water heads. This type of pressure gauge can measure the pressure of magnitude from 0.1 Pa to 10 Pa.
journal article
日本機械学会
1991-09
application/pdf
日本機械学会論文集. B編
541
57
3013
3017
日本機械学会論文集. B編
AN00187441
03875016
https://niigata-u.repo.nii.ac.jp/record/3735/files/9_0035.pdf
jpn
http://ci.nii.ac.jp/naid/110002390013
日本機械学会
本文データは学会の許諾に基づくCiNiiからの複製である