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oai:niigata-u.repo.nii.ac.jp:00003081
2022-12-15T04:13:15Z
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Development of Scanning Laser Interferometer with Wide Field of View : Measurement of Small Lens Mold
レーザスポット走査型干渉計の開発 : 小型レンズ金型の形状計測
レーザスポット走査型干渉計の開発 : 小型レンズ金型の形状計測
本合, 邦彦
40655
月山, 陽介
40656
鈴木, 天
40657
新田, 勇
58
lens mold
surface profilometry
scanning laser interferometer
ultra precision machining
Small lenses are one of the most important elements in digital devices such as mobile phones with cameras. In order to minimize the machining error of aspheric lens molds with high form accuracy, on-machine measurement of the lens mold shape is important. However, they require large field of view of mm order in diameter, robustness against vibrational noises from environment, short tact time, and compact body for on-machine measurements. We developed a Fizeau-type interferometer with wide field of view. The interferometer has small laser spot of 2.5μm in diameter, which scans over the 10mm x 8mm of observation area. With the use of transparent reference plates set over the concave of the lens mold, fringe patterns of lens mold with about 1.5mm in diameter was successfully observed in 80 seconds. This interferometer is also designed in a compact size.
journal article
精密工学会
2014-03
application/pdf
精密工学会誌
3
80
302
307
精密工学会誌
AN1003250X
09120289
https://niigata-u.repo.nii.ac.jp/record/3081/files/80_3_302-307.pdf
jpn
Copyright(C)2014 精密工学会