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Real-time range finder based on phase- and modulation-amplitude-locked laser diode interferometry Real-time range finder based on phase- and modulation-amplitude-locked laser diode interferometry Suzuki, Takamasa 39 Iwana, Tatsuo 7467 Sasaki, Osami 7468 interferometry laser diodes phase lock modulation-amplitude lock sinusoidal phase modulation An interferometric range finder that uses both phase-locked and modulation-amplitude-locked techniques in a sinusoidal phase-modulating interference signal is described. It allows us to perform unambiguous and real-time distance measurement. Also, external disturbance superimposed on the interference signal is eliminated by the feedback control. Our preliminary experiments indicate a measurement error of 17.7 μm rms. journal article International Society for Optical Engineering, SPIE 2004-11 application/pdf Optical Engineering 11 43 2742 2746 Optical Engineering AA00333891 00913286 https://niigata-u.repo.nii.ac.jp/record/2207/files/43_11_2742-2746.pdf http://hdl.handle.net/10191/27617 https://niigata-u.repo.nii.ac.jp/records/2207 eng info:doi/10.1117/1.1799071 Copyright 2004 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.