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Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect
Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect
Ohkawa, Masashi
7442
Sato, Takashi
7443
guided-wave optics
pressure sensor
diaphragm
glass waveguide
elasto-optic effect
We experimentally investigated the relationship between sensitivity and diaphragm thickness in a glass-based guided-wave optical pressure sensor using intermodal interference between the fundamental TM-like and TE-like modes. The sensor consists of a rectangular diaphragm and a straight single-mode waveguide on the diaphragm. The sensitivity is theoretically known to be inversely proportional to the square of the diaphragm thickness. In this study, to examine this relationship, four sensors with diaphragm thicknesses of 0.30 mm, 0.22 mm, 0.20 mm, and 0.15 mm were fabricated. The area of the diaphragm was 10 mm×10 mm. For the waveguide position nearest to the center of the diaphragm, the measured sensitivities almost agreed with the theoretical ones.
journal article
International Society for Optical Engineering, SPIE
2008-04
application/pdf
Optical Engineering
4
47
044402-1
044402-5
Optical Engineering
AA00333891
00913286
https://niigata-u.repo.nii.ac.jp/record/2199/files/47_4_044402.pdf
eng
info:doi/10.1117/1.2909669
Copyright 2008 Society of Photo-Optical Instrumentation Engineers