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Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer
Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer
Suzuki, Takamasa
39
Kobayashi, Katsuyuki
4178
Sasaki, Osami
4179
A two-wavelength interferometer that uses two separate modulating currents with different phases but the same frequencies to detect a greater degree of object displacement in real time is proposed and demonstrated. The measurement error was 57 nm, roughly 1/80 of the synthetic wavelength. We have confirmed that this modulating technique enables us to equip our prototype interferometer with a simple feedback-control system that eliminates external disturbance.
journal article
Optical Society of America
2000-06
application/pdf
Applied Optics
16
39
2646
2652
Applied Optics
AA00543409
00036935
https://niigata-u.repo.nii.ac.jp/record/1532/files/39_16_2646-2652.pdf
eng
info:doi/10.1364/AO.39.002646
© 2000 Optical Society of America
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.39.002646. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.