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Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation
Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation
Suzuki, Takamasa
39
Yazawa, Takayuki
4165
Sasaki, Osami
4166
We describe an interferometer system that uses two separate wavelengths to measure step height. The overlapping interference images detected by a CCD camera are easily separated by an ordinary integrating-bucket method and time-sharing sinusoidal phase modulation, in which two laser diodes are alternately modulated with a sinusoidal signal. A phase map is obtained only for the laser diode into which the modulation signal is injected. In this instance, a 1-microm step height was accurately detected.
journal article
Optical Society of America
2002-04
application/pdf
Applied Optics
10
41
1972
1976
Applied Optics
AA00543409
00036935
https://niigata-u.repo.nii.ac.jp/record/1528/files/41_10_1972-1976.pdf
eng
info:doi/10.1364/AO.41.001972
© 2002 Optical Society of America
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.41.001972. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.