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Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer
Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer
Suzuki, Takamasa
39
Maki, Toshiyuki
4161
Zhao, Xuefeng
4162
Sasaki, Osami
4163
A surface profiler that incorporates a feedback controller to eliminate external disturbances is proposed and demonstrated. Its overall performance is dependent on the frequency response of the feedback loop. The frequency of the modulating signal strongly inlfluences the response of the feedback controller. When we used the integrating-bucket method, the CCD camera had to be operated at a low-frequency video rate. Our technique uses a CCD camera equipped with an electronic shutter. The shutter function enables us to apply high-speed sinusoidal pilase modulation to the conventional integrating-bucket method under the standard video rate.
journal article
Optical Society of America
2002-04
application/pdf
Applied Optics
10
41
1949
1953
Applied Optics
AA00543409
00036935
https://niigata-u.repo.nii.ac.jp/record/1527/files/41_10_1949-1953.pdf
eng
info:doi/10.1364/AO.41.001949
© 2002 Optical Society of America
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.41.001949. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.